JPH0211841B2 - - Google Patents
Info
- Publication number
- JPH0211841B2 JPH0211841B2 JP4254182A JP4254182A JPH0211841B2 JP H0211841 B2 JPH0211841 B2 JP H0211841B2 JP 4254182 A JP4254182 A JP 4254182A JP 4254182 A JP4254182 A JP 4254182A JP H0211841 B2 JPH0211841 B2 JP H0211841B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- signal
- defect
- movement
- edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 111
- 238000007689 inspection Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 8
- 238000001914 filtration Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000002950 deficient Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 10
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 7
- 239000000872 buffer Substances 0.000 description 4
- 230000002457 bidirectional effect Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005070 sampling Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57042541A JPS58161320A (ja) | 1982-03-19 | 1982-03-19 | 規則性パタ−ンの欠陥検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57042541A JPS58161320A (ja) | 1982-03-19 | 1982-03-19 | 規則性パタ−ンの欠陥検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58161320A JPS58161320A (ja) | 1983-09-24 |
| JPH0211841B2 true JPH0211841B2 (enrdf_load_stackoverflow) | 1990-03-16 |
Family
ID=12638920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57042541A Granted JPS58161320A (ja) | 1982-03-19 | 1982-03-19 | 規則性パタ−ンの欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58161320A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06212629A (ja) * | 1991-08-30 | 1994-08-02 | Samsung Construction Co Ltd | 地中アンカーとロックボルトの施工方法及びその組立体 |
-
1982
- 1982-03-19 JP JP57042541A patent/JPS58161320A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06212629A (ja) * | 1991-08-30 | 1994-08-02 | Samsung Construction Co Ltd | 地中アンカーとロックボルトの施工方法及びその組立体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58161320A (ja) | 1983-09-24 |