JPS58155343U - ＺｎＳｅ化合物の気相反応装置 - Google Patents

ＺｎＳｅ化合物の気相反応装置

Info

Publication number
JPS58155343U
JPS58155343U JP4994782U JP4994782U JPS58155343U JP S58155343 U JPS58155343 U JP S58155343U JP 4994782 U JP4994782 U JP 4994782U JP 4994782 U JP4994782 U JP 4994782U JP S58155343 U JPS58155343 U JP S58155343U
Authority
JP
Japan
Prior art keywords
zinc
gas phase
compound
gas
zn5e
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4994782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6135562Y2 (enrdf_load_stackoverflow
Inventor
始 大坂
宏邦 難波
文章 樋口
香門　浩一
Original Assignee
工業技術院長
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長 filed Critical 工業技術院長
Priority to JP4994782U priority Critical patent/JPS58155343U/ja
Publication of JPS58155343U publication Critical patent/JPS58155343U/ja
Application granted granted Critical
Publication of JPS6135562Y2 publication Critical patent/JPS6135562Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP4994782U 1982-04-08 1982-04-08 ＺｎＳｅ化合物の気相反応装置 Granted JPS58155343U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4994782U JPS58155343U (ja) 1982-04-08 1982-04-08 ＺｎＳｅ化合物の気相反応装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4994782U JPS58155343U (ja) 1982-04-08 1982-04-08 ＺｎＳｅ化合物の気相反応装置

Publications (2)

Publication Number Publication Date
JPS58155343U true JPS58155343U (ja) 1983-10-17
JPS6135562Y2 JPS6135562Y2 (enrdf_load_stackoverflow) 1986-10-16

Family

ID=30060764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4994782U Granted JPS58155343U (ja) 1982-04-08 1982-04-08 ＺｎＳｅ化合物の気相反応装置

Country Status (1)

Country Link
JP (1) JPS58155343U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113298A1 (ja) * 2009-04-01 2010-10-07 電気化学工業株式会社 気相反応装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113298A1 (ja) * 2009-04-01 2010-10-07 電気化学工業株式会社 気相反応装置
JP5511794B2 (ja) * 2009-04-01 2014-06-04 電気化学工業株式会社 気相反応装置

Also Published As

Publication number Publication date
JPS6135562Y2 (enrdf_load_stackoverflow) 1986-10-16

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