JPS52123871A - Thin film forming method - Google Patents

Thin film forming method

Info

Publication number
JPS52123871A
JPS52123871A JP4027076A JP4027076A JPS52123871A JP S52123871 A JPS52123871 A JP S52123871A JP 4027076 A JP4027076 A JP 4027076A JP 4027076 A JP4027076 A JP 4027076A JP S52123871 A JPS52123871 A JP S52123871A
Authority
JP
Japan
Prior art keywords
thin film
film forming
forming method
lift
spacing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4027076A
Other languages
Japanese (ja)
Inventor
Hisao Nozawa
Yoshio Honma
Yukiyoshi Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4027076A priority Critical patent/JPS52123871A/en
Publication of JPS52123871A publication Critical patent/JPS52123871A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To deposit thin film of high bonding strength to a substrate by lift-off technique at a spacing between deposited thin films of less than 7μ by using composite structure having a metal mask layer.
COPYRIGHT: (C)1977,JPO&Japio
JP4027076A 1976-04-12 1976-04-12 Thin film forming method Pending JPS52123871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4027076A JPS52123871A (en) 1976-04-12 1976-04-12 Thin film forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4027076A JPS52123871A (en) 1976-04-12 1976-04-12 Thin film forming method

Publications (1)

Publication Number Publication Date
JPS52123871A true JPS52123871A (en) 1977-10-18

Family

ID=12575939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4027076A Pending JPS52123871A (en) 1976-04-12 1976-04-12 Thin film forming method

Country Status (1)

Country Link
JP (1) JPS52123871A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS556404A (en) * 1978-06-26 1980-01-17 Fujitsu Ltd Forming method for pattern
JPS5693328A (en) * 1979-12-26 1981-07-28 Nec Corp Formation of mask pattern
JPH0886850A (en) * 1994-08-30 1996-04-02 Lg Semicon Co Ltd Manufacture of conductive microbridge

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS556404A (en) * 1978-06-26 1980-01-17 Fujitsu Ltd Forming method for pattern
JPS5693328A (en) * 1979-12-26 1981-07-28 Nec Corp Formation of mask pattern
JPH0886850A (en) * 1994-08-30 1996-04-02 Lg Semicon Co Ltd Manufacture of conductive microbridge

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