JPS52123871A - Thin film forming method - Google Patents
Thin film forming methodInfo
- Publication number
- JPS52123871A JPS52123871A JP4027076A JP4027076A JPS52123871A JP S52123871 A JPS52123871 A JP S52123871A JP 4027076 A JP4027076 A JP 4027076A JP 4027076 A JP4027076 A JP 4027076A JP S52123871 A JPS52123871 A JP S52123871A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film forming
- forming method
- lift
- spacing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To deposit thin film of high bonding strength to a substrate by lift-off technique at a spacing between deposited thin films of less than 7μ by using composite structure having a metal mask layer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4027076A JPS52123871A (en) | 1976-04-12 | 1976-04-12 | Thin film forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4027076A JPS52123871A (en) | 1976-04-12 | 1976-04-12 | Thin film forming method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52123871A true JPS52123871A (en) | 1977-10-18 |
Family
ID=12575939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4027076A Pending JPS52123871A (en) | 1976-04-12 | 1976-04-12 | Thin film forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52123871A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS556404A (en) * | 1978-06-26 | 1980-01-17 | Fujitsu Ltd | Forming method for pattern |
JPS5693328A (en) * | 1979-12-26 | 1981-07-28 | Nec Corp | Formation of mask pattern |
JPH0886850A (en) * | 1994-08-30 | 1996-04-02 | Lg Semicon Co Ltd | Manufacture of conductive microbridge |
-
1976
- 1976-04-12 JP JP4027076A patent/JPS52123871A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS556404A (en) * | 1978-06-26 | 1980-01-17 | Fujitsu Ltd | Forming method for pattern |
JPS5693328A (en) * | 1979-12-26 | 1981-07-28 | Nec Corp | Formation of mask pattern |
JPH0886850A (en) * | 1994-08-30 | 1996-04-02 | Lg Semicon Co Ltd | Manufacture of conductive microbridge |
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