JPS5815494Y2 - 処理装置 - Google Patents

処理装置

Info

Publication number
JPS5815494Y2
JPS5815494Y2 JP633179U JP633179U JPS5815494Y2 JP S5815494 Y2 JPS5815494 Y2 JP S5815494Y2 JP 633179 U JP633179 U JP 633179U JP 633179 U JP633179 U JP 633179U JP S5815494 Y2 JPS5815494 Y2 JP S5815494Y2
Authority
JP
Japan
Prior art keywords
etching
electrodes
holes
gas
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP633179U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55106669U (enrdf_load_stackoverflow
Inventor
匡彦 伝田
繁治 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP633179U priority Critical patent/JPS5815494Y2/ja
Publication of JPS55106669U publication Critical patent/JPS55106669U/ja
Application granted granted Critical
Publication of JPS5815494Y2 publication Critical patent/JPS5815494Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP633179U 1979-01-19 1979-01-19 処理装置 Expired JPS5815494Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP633179U JPS5815494Y2 (ja) 1979-01-19 1979-01-19 処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP633179U JPS5815494Y2 (ja) 1979-01-19 1979-01-19 処理装置

Publications (2)

Publication Number Publication Date
JPS55106669U JPS55106669U (enrdf_load_stackoverflow) 1980-07-25
JPS5815494Y2 true JPS5815494Y2 (ja) 1983-03-29

Family

ID=28813015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP633179U Expired JPS5815494Y2 (ja) 1979-01-19 1979-01-19 処理装置

Country Status (1)

Country Link
JP (1) JPS5815494Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0236276Y2 (enrdf_load_stackoverflow) * 1985-01-10 1990-10-03

Also Published As

Publication number Publication date
JPS55106669U (enrdf_load_stackoverflow) 1980-07-25

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