JPS5813505B2 - コ−テイング装置 - Google Patents

コ−テイング装置

Info

Publication number
JPS5813505B2
JPS5813505B2 JP48141144A JP14114473A JPS5813505B2 JP S5813505 B2 JPS5813505 B2 JP S5813505B2 JP 48141144 A JP48141144 A JP 48141144A JP 14114473 A JP14114473 A JP 14114473A JP S5813505 B2 JPS5813505 B2 JP S5813505B2
Authority
JP
Japan
Prior art keywords
chamber
coating
vapor
nozzle
carrier gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48141144A
Other languages
English (en)
Japanese (ja)
Other versions
JPS4989716A (fr
Inventor
ジヨン・フランク・ソプコ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PPG Industries Inc
Original Assignee
PPG Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PPG Industries Inc filed Critical PPG Industries Inc
Publication of JPS4989716A publication Critical patent/JPS4989716A/ja
Publication of JPS5813505B2 publication Critical patent/JPS5813505B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/217—FeOx, CoOx, NiOx
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/219—CrOx, MoOx, WOx
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)
JP48141144A 1972-12-15 1973-12-14 コ−テイング装置 Expired JPS5813505B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US31539572A 1972-12-15 1972-12-15

Publications (2)

Publication Number Publication Date
JPS4989716A JPS4989716A (fr) 1974-08-27
JPS5813505B2 true JPS5813505B2 (ja) 1983-03-14

Family

ID=23224212

Family Applications (2)

Application Number Title Priority Date Filing Date
JP48141144A Expired JPS5813505B2 (ja) 1972-12-15 1973-12-14 コ−テイング装置
JP56205042A Expired JPS6028772B2 (ja) 1972-12-15 1981-12-17 コ−テイング方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP56205042A Expired JPS6028772B2 (ja) 1972-12-15 1981-12-17 コ−テイング方法

Country Status (11)

Country Link
JP (2) JPS5813505B2 (fr)
BE (1) BE808674A (fr)
CA (1) CA1022807A (fr)
DE (1) DE2361744B2 (fr)
DK (1) DK142169B (fr)
FR (1) FR2214246A5 (fr)
GB (1) GB1454378A (fr)
IT (1) IT999992B (fr)
NL (1) NL167402B (fr)
SE (1) SE409337B (fr)
ZA (1) ZA735383B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60142303A (ja) * 1983-12-29 1985-07-27 Sumitomo Electric Ind Ltd 多心コア光伝送用フアイバならびに製造方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1524326A (en) * 1976-04-13 1978-09-13 Bfg Glassgroup Coating of glass
DE2739258C2 (de) * 1977-08-31 1985-06-20 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verfahren zur Aufbringung einer Siliciumcarbid und Siliciumnitrid enthaltenden Schutzschicht auf Kohlenstofformkörper
US4393095A (en) * 1982-02-01 1983-07-12 Ppg Industries, Inc. Chemical vapor deposition of vanadium oxide coatings
US4501602A (en) * 1982-09-15 1985-02-26 Corning Glass Works Process for making sintered glasses and ceramics
GB8531424D0 (en) * 1985-12-20 1986-02-05 Glaverbel Coating glass
NO168762C (no) * 1985-12-20 1992-04-01 Glaverbel Belagt, flatt glass.
JPH09169545A (ja) 1995-12-21 1997-06-30 Th Goldschmidt Ag 酸化アンチモンドープした酸化スズからなる透過率を低下する層をガラスおよびガラスセラミックに熱分解的に製造する方法、およびそのための配合物
KR20010066533A (ko) * 1999-12-31 2001-07-11 정종순 안정한 코팅용 기화물 생성방법 및 장치
JP2015113273A (ja) * 2013-12-13 2015-06-22 日本電気硝子株式会社 ロールクリーニング装置
DE102014116991A1 (de) * 2014-11-20 2016-05-25 Aixtron Se CVD- oder PVD-Reaktor zum Beschichten großflächiger Substrate

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3438803A (en) * 1965-05-18 1969-04-15 Anchor Hocking Glass Corp Method and means for vapor coating
US3699027A (en) * 1970-02-02 1972-10-17 Ransburg Electro Coating Corp Deposition method
DE2047813B2 (de) * 1970-09-29 1971-10-07 Battelle Institut e V , 6000 Frank fürt Verfahren zur abscheidung von ueberzuegen
US3808035A (en) * 1970-12-09 1974-04-30 M Stelter Deposition of single or multiple layers on substrates from dilute gas sweep to produce optical components, electro-optical components, and the like

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60142303A (ja) * 1983-12-29 1985-07-27 Sumitomo Electric Ind Ltd 多心コア光伝送用フアイバならびに製造方法

Also Published As

Publication number Publication date
DK142169B (da) 1980-09-15
BE808674A (fr) 1974-06-14
JPS6028772B2 (ja) 1985-07-06
GB1454378A (en) 1976-11-03
JPS57129843A (en) 1982-08-12
DE2361744B2 (de) 1978-05-18
CA1022807A (fr) 1977-12-20
IT999992B (it) 1976-03-10
DE2361744A1 (de) 1974-07-04
NL7313244A (fr) 1974-06-18
AU5940973A (en) 1975-02-20
NL167402B (nl) 1981-07-16
FR2214246A5 (fr) 1974-08-09
ZA735383B (en) 1975-03-26
DK142169C (fr) 1981-02-16
SE409337B (sv) 1979-08-13
JPS4989716A (fr) 1974-08-27

Similar Documents

Publication Publication Date Title
US3970037A (en) Coating composition vaporizer
US3850679A (en) Chemical vapor deposition of coatings
US3888649A (en) Nozzle for chemical vapor deposition of coatings
US4584206A (en) Chemical vapor deposition of a reflective film on the bottom surface of a float glass ribbon
US3885066A (en) Method for coating continuously advancing substrate
EP0303911B1 (fr) Vaporisateur à colonnes multiples et parallèles
US4508054A (en) Device for depositing a mineral oxide coating on a substrate
JP4447069B2 (ja) 化学気相成長装置
CA1337165C (fr) Depot d'une mince pellicule d'oxyde d'etain sur du verre flotte dans le bain d'etain
JPS5813505B2 (ja) コ−テイング装置
KR20000029951A (ko) 판글래스상에산화주석및산화티타늄코팅을증착시키는방법과그에따라코팅된글래스
JPS5827215B2 (ja) コ−ティング装置
US4293326A (en) Glass coating
EA021546B1 (ru) Способ и устройство для получения покрытия на поверхности стекла
US4900110A (en) Chemical vapor deposition of a reflective film on the bottom surface of a float glass ribbon
US3951100A (en) Chemical vapor deposition of coatings
AU618543B2 (en) Apparatus for coating a substrate
US5882368A (en) Method for coating glass substrates by ultrasonic nebulization of solutions
US3942469A (en) Vapor deposition nozzle
US8642120B2 (en) Method and apparatus for coating glass substrate
WO2011161311A1 (fr) Appareil de revêtement
JP2000119856A (ja) Ｃｖｄ法による被膜形成法およびその装置
MXPA98001262A (es) Metodo y aparato para recubrir substratos de vidrio por nebulizacion ultrasonica de soluciones