JPS5812478B2 - 真空ポンプ用軸受 - Google Patents

真空ポンプ用軸受

Info

Publication number
JPS5812478B2
JPS5812478B2 JP50117102A JP11710275A JPS5812478B2 JP S5812478 B2 JPS5812478 B2 JP S5812478B2 JP 50117102 A JP50117102 A JP 50117102A JP 11710275 A JP11710275 A JP 11710275A JP S5812478 B2 JPS5812478 B2 JP S5812478B2
Authority
JP
Japan
Prior art keywords
rotor
bearing
axial
casing
axial position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50117102A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5160005A (forum.php
Inventor
ヴイリ・ベツカー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BARUTSUERUSU PATENTO UNTO BETAIRIGUNKUSU AG
Original Assignee
BARUTSUERUSU PATENTO UNTO BETAIRIGUNKUSU AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BARUTSUERUSU PATENTO UNTO BETAIRIGUNKUSU AG filed Critical BARUTSUERUSU PATENTO UNTO BETAIRIGUNKUSU AG
Publication of JPS5160005A publication Critical patent/JPS5160005A/ja
Publication of JPS5812478B2 publication Critical patent/JPS5812478B2/ja
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0476—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings
    • F16C32/0478—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings with permanent magnets to support radial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP50117102A 1974-09-27 1975-09-27 真空ポンプ用軸受 Expired JPS5812478B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1313274A CH583856A5 (forum.php) 1974-09-27 1974-09-27

Publications (2)

Publication Number Publication Date
JPS5160005A JPS5160005A (forum.php) 1976-05-25
JPS5812478B2 true JPS5812478B2 (ja) 1983-03-08

Family

ID=4389593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50117102A Expired JPS5812478B2 (ja) 1974-09-27 1975-09-27 真空ポンプ用軸受

Country Status (7)

Country Link
US (1) US4036565A (forum.php)
JP (1) JPS5812478B2 (forum.php)
CH (1) CH583856A5 (forum.php)
DE (1) DE2537367B2 (forum.php)
FR (1) FR2286298A1 (forum.php)
GB (1) GB1481658A (forum.php)
NL (1) NL158265B (forum.php)

Families Citing this family (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2457783C2 (de) * 1974-12-06 1986-10-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
FR2377551A1 (fr) * 1977-01-13 1978-08-11 Europ Propulsion Systeme de suspension magnetique demontable
NL184487C (nl) * 1977-02-25 1989-08-01 Ultra Centrifuge Nederland Nv Moleculaire pomp.
DE2711065C3 (de) * 1977-03-14 1982-05-19 Gesellschaft für Kernverfahrenstechnik mbH, 5170 Jülich Radial gedämpftes Fanglager für überkritisch laufende Rotoren
US4303281A (en) * 1977-05-23 1981-12-01 Irby Holcomb B Magnetic ball thrust bearing
DE2818255A1 (de) * 1978-04-26 1979-11-08 Teldix Gmbh Magnetische lageranordnung
DE2842165C2 (de) * 1978-09-28 1987-03-26 Teldix Gmbh, 6900 Heidelberg Magnetische Lagereinrichtung
FR2451480A1 (fr) * 1979-03-16 1980-10-10 Belenger Jacques Pompe centrifuge medicale
US4312628A (en) * 1979-05-21 1982-01-26 Cambridge Thermionic Corporation Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control
DE3128305A1 (de) * 1981-07-17 1983-02-03 Karsten 7500 Karlsruhe Laing In-line-kreiselpumpe
JPS5841296A (ja) * 1981-09-04 1983-03-10 Seiko Instr & Electronics Ltd 磁気軸受を応用した小型軸流分子ポンプ
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
FR2528127A1 (fr) * 1982-06-04 1983-12-09 Creusot Loire Moto-compresseur centrifuge electrique integre a grande vitesse
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
DE3243641C2 (de) * 1982-11-25 1996-03-14 Teldix Gmbh Kippbare Lagerung eines Rotors
JPS59101596A (ja) * 1982-12-01 1984-06-12 Ntn Toyo Bearing Co Ltd タ−ボ分子ポンプ
DE3302839A1 (de) * 1983-01-28 1984-08-02 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Turbomolekularpumpe mit induktivitaetsarmem gleichstrommotor, bremseinrichtung und verfahren zum betrieb derselben
JPS5946394A (ja) * 1983-07-13 1984-03-15 Hitachi Ltd タ−ボ分子ポンプ
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
GB2186635B (en) * 1986-02-18 1990-01-31 Easthorpe Investments Ltd Centrifugal pump particularly for domestic appliances such as washing machines,dishwashers,and the like
JPS62218692A (ja) * 1986-03-18 1987-09-26 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
FR2659396B1 (fr) * 1990-03-07 1992-05-15 Cit Alcatel Pompe a vide pour vide moleculaire propre.
JP2999607B2 (ja) * 1991-09-30 2000-01-17 日本精工株式会社 超電導軸受装置とその操作方法
DE4227013A1 (de) * 1992-08-14 1994-02-17 Budig Peter Klaus Prof Dr Sc T Aktives magnetisches Axiallager für Rotoren mit Notlauflager
DE4237971B4 (de) * 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vakuumpumpe mit Wandler
DE69405311T2 (de) * 1993-06-24 1998-04-09 Iwaki Co Ltd Magnetisch angetriebene Pumpe mit hinten angeordnetem Drucklagerelement
CA2132582C (en) * 1993-11-12 1999-01-05 Paul Gergets Magnetically driven positive displacement pump and thrust bearing assembly
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
FR2728738B1 (fr) * 1994-12-26 1997-01-31 Cit Alcatel Ensemble tournant comportant notamment des moyens de sustentation radiaux et une butee axiale magnetique
US5685700A (en) * 1995-06-01 1997-11-11 Advanced Bionics, Inc. Bearing and seal-free blood pump
US5924848A (en) * 1995-06-01 1999-07-20 Advanced Bionics, Inc. Blood pump having radial vanes with enclosed magnetic drive components
US6206659B1 (en) 1995-06-01 2001-03-27 Advanced Bionics, Inc. Magnetically driven rotor for blood pump
US5938412A (en) * 1995-06-01 1999-08-17 Advanced Bionics, Inc. Blood pump having rotor with internal bore for fluid flow
US6254359B1 (en) * 1996-05-10 2001-07-03 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method for providing a jewel bearing for supporting a pump rotor shaft
US5779456A (en) * 1996-10-28 1998-07-14 Finish Thompson Inc. Magnetic drive
US5708313A (en) * 1996-10-28 1998-01-13 Finish Thompson Inc. Sump pump
US6074165A (en) * 1998-03-10 2000-06-13 Varian, Inc. Vacuum pump with magnetic bearing system and back-up bearings
GB2335242A (en) * 1998-03-12 1999-09-15 Copal Electronics Rotor support with one or two pairs of permanent magnetic bearings and a pivot
DE19944863A1 (de) * 1999-09-18 2001-04-19 Forschungszentrum Juelich Gmbh Magnetlager
ES2215044T3 (es) 1999-04-20 2004-10-01 Forschungszentrum Julich Gmbh Dispositivo de rotor.
US6270324B1 (en) * 1999-10-26 2001-08-07 Tuthill Corp. Positive displacement pump and thrust bearing assembly
DE10010371A1 (de) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10043235A1 (de) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh Vakuumpumpe
US6641378B2 (en) * 2001-11-13 2003-11-04 William D. Davis Pump with electrodynamically supported impeller
DE20211510U1 (de) * 2002-07-13 2003-11-27 Leybold Vakuum Gmbh Magnetlager
US6914361B2 (en) 2003-03-07 2005-07-05 Leybold Vakuum Gmbh Magnetic bearing
WO2004106746A1 (en) * 2003-05-15 2004-12-09 William Davis Pump with magnetic bearings
US7052253B2 (en) * 2003-05-19 2006-05-30 Advanced Bionics, Inc. Seal and bearing-free fluid pump incorporating a passively suspended self-positioning impeller
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
EP1892816A1 (en) 2006-08-24 2008-02-27 Chien-Chun Yu Magnetic floating shaft set and apparatus using same
JP5056152B2 (ja) * 2007-05-15 2012-10-24 株式会社島津製作所 ターボ分子ポンプ
CN103557187A (zh) * 2013-11-25 2014-02-05 重庆星格泵业集团有限公司 一种便拆式离心泵
JP6427963B2 (ja) * 2014-06-03 2018-11-28 株式会社島津製作所 真空ポンプ
EP3244067B1 (de) * 2016-05-10 2020-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe und verfahren zum verringern einer restunwucht in einer vakuumpumpe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3933416A (en) * 1945-05-01 1976-01-20 Donelian Khatchik O Hermatically sealed motor blower unit with stator inside hollow armature
US3107310A (en) * 1960-08-03 1963-10-15 Const Mecanique Magnetic coupling having a magnetic bearing
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
US3243238A (en) * 1962-07-20 1966-03-29 Lyman Joseph Magnetic suspension
DE1933031C3 (de) * 1969-06-30 1978-10-26 Karl 5170 Juelich Boden Magnetische Lagerung
FR2086525A5 (forum.php) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
US3614181A (en) * 1970-07-02 1971-10-19 Us Air Force Magnetic bearing for combined radial and thrust loads
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
FR2110581A5 (forum.php) * 1970-10-22 1972-06-02 Habermann Helmut
DE2108590A1 (de) * 1971-02-23 1972-09-07 Siemens Ag Anordnung zur Lagerung einer hochtourig, insbesondere elektromotorisch angetriebenen Welle
US3860300A (en) * 1971-07-07 1975-01-14 Cambridge Thermionic Corp Virtually zero powered magnetic suspension
CH540436A (de) * 1971-07-12 1973-08-15 Sulzer Ag Turbokompressor, welcher das Arbeitsmedium bei tiefer Temperatur ansaugt
DE2210995C2 (de) * 1972-03-08 1974-02-21 Teldix Gmbh, 6900 Heidelberg Magnetische Vorrichtung, insbesondere für ein Schwungrad

Also Published As

Publication number Publication date
JPS5160005A (forum.php) 1976-05-25
DE2537367C3 (forum.php) 1985-01-31
GB1481658A (en) 1977-08-03
FR2286298A1 (fr) 1976-04-23
NL7414250A (nl) 1976-03-30
DE2537367A1 (de) 1976-04-15
NL158265C (forum.php) 1979-03-15
US4036565A (en) 1977-07-19
FR2286298B1 (forum.php) 1981-08-21
NL158265B (nl) 1978-10-16
CH583856A5 (forum.php) 1977-01-14
DE2537367B2 (de) 1980-03-06

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