JPS58119651A - 半導体装置およびその製造方法 - Google Patents

半導体装置およびその製造方法

Info

Publication number
JPS58119651A
JPS58119651A JP172682A JP172682A JPS58119651A JP S58119651 A JPS58119651 A JP S58119651A JP 172682 A JP172682 A JP 172682A JP 172682 A JP172682 A JP 172682A JP S58119651 A JPS58119651 A JP S58119651A
Authority
JP
Japan
Prior art keywords
film
conductive material
wiring
layer
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP172682A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0113225B2 (OSRAM
Inventor
Takashi Morimoto
孝 森本
Susumu Muramoto
村本　進
Kohei Ebara
江原　孝平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP172682A priority Critical patent/JPS58119651A/ja
Publication of JPS58119651A publication Critical patent/JPS58119651A/ja
Publication of JPH0113225B2 publication Critical patent/JPH0113225B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP172682A 1982-01-11 1982-01-11 半導体装置およびその製造方法 Granted JPS58119651A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP172682A JPS58119651A (ja) 1982-01-11 1982-01-11 半導体装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP172682A JPS58119651A (ja) 1982-01-11 1982-01-11 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JPS58119651A true JPS58119651A (ja) 1983-07-16
JPH0113225B2 JPH0113225B2 (OSRAM) 1989-03-03

Family

ID=11509563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP172682A Granted JPS58119651A (ja) 1982-01-11 1982-01-11 半導体装置およびその製造方法

Country Status (1)

Country Link
JP (1) JPS58119651A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02224357A (ja) * 1989-02-27 1990-09-06 Mitsubishi Electric Corp 半導体装置の製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840525A (OSRAM) * 1971-09-21 1973-06-14
JPS50151711A (OSRAM) * 1974-04-29 1975-12-05
JPS5212545A (en) * 1975-07-21 1977-01-31 Hitachi Ltd Mos push-pull circuit
JPS5340278A (en) * 1976-09-27 1978-04-12 Hitachi Ltd Manufacture of semiconductor device
JPS5427292A (en) * 1977-08-01 1979-03-01 Kendall & Co Container
JPS5511354A (en) * 1978-07-12 1980-01-26 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor
JPS55131159A (en) * 1979-03-30 1980-10-11 Sumitomo Metal Ind Ltd High tensile low alloy steel for steel pipe

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840525A (OSRAM) * 1971-09-21 1973-06-14
JPS50151711A (OSRAM) * 1974-04-29 1975-12-05
JPS5212545A (en) * 1975-07-21 1977-01-31 Hitachi Ltd Mos push-pull circuit
JPS5340278A (en) * 1976-09-27 1978-04-12 Hitachi Ltd Manufacture of semiconductor device
JPS5427292A (en) * 1977-08-01 1979-03-01 Kendall & Co Container
JPS5511354A (en) * 1978-07-12 1980-01-26 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor
JPS55131159A (en) * 1979-03-30 1980-10-11 Sumitomo Metal Ind Ltd High tensile low alloy steel for steel pipe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02224357A (ja) * 1989-02-27 1990-09-06 Mitsubishi Electric Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0113225B2 (OSRAM) 1989-03-03

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