JPS58115832A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS58115832A
JPS58115832A JP56211191A JP21119181A JPS58115832A JP S58115832 A JPS58115832 A JP S58115832A JP 56211191 A JP56211191 A JP 56211191A JP 21119181 A JP21119181 A JP 21119181A JP S58115832 A JPS58115832 A JP S58115832A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
recess
insulating layer
layer
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56211191A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345530B2 (enExample
Inventor
Tsutomu Ogawa
力 小川
Hajime Kamioka
上岡　元
Seiichiro Kawamura
河村　誠一郎
Junji Sakurai
桜井　潤治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56211191A priority Critical patent/JPS58115832A/ja
Priority to DE8282306973T priority patent/DE3278259D1/de
Priority to EP82306973A priority patent/EP0084265B1/en
Publication of JPS58115832A publication Critical patent/JPS58115832A/ja
Priority to US07/553,361 priority patent/US5011783A/en
Publication of JPH0345530B2 publication Critical patent/JPH0345530B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/32—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by intermediate layers between substrates and deposited layers
    • H10P14/3202—Materials thereof
    • H10P14/3238—Materials thereof being insulating materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901—Materials
    • H10P14/2902—Materials being Group IVA materials
    • H10P14/2905—Silicon, silicon germanium or germanium
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3404—Deposited materials, e.g. layers characterised by the chemical composition being Group IVA materials
    • H10P14/3411—Silicon, silicon germanium or germanium
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3451—Structure
    • H10P14/3452—Microstructure
    • H10P14/3458—Monocrystalline
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/38—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by treatments done after the formation of the materials
    • H10P14/3802—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H10P14/3808—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/38—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by treatments done after the formation of the materials
    • H10P14/3802—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H10P14/3818—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using particle beams
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19—Preparing inhomogeneous wafers
    • H10P90/1904—Preparing vertically inhomogeneous wafers
    • H10P90/1906—Preparing SOI wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/061—Manufacture or treatment using SOI processes together with lateral isolation, e.g. combinations of SOI and shallow trench isolations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19—Preparing inhomogeneous wafers
    • H10P90/1904—Preparing vertically inhomogeneous wafers
    • H10P90/1906—Preparing SOI wafers
    • H10P90/1912—Preparing SOI wafers using selective deposition, e.g. epitaxial lateral overgrowth [ELO] or selective deposition of single crystal silicon

Landscapes

  • Recrystallisation Techniques (AREA)
  • Element Separation (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP56211191A 1981-12-28 1981-12-28 半導体装置の製造方法 Granted JPS58115832A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP56211191A JPS58115832A (ja) 1981-12-28 1981-12-28 半導体装置の製造方法
DE8282306973T DE3278259D1 (en) 1981-12-28 1982-12-24 Method of producing a semiconductor device comprising a plurality of recrystallized monocrystal regions
EP82306973A EP0084265B1 (en) 1981-12-28 1982-12-24 Method of producing a semiconductor device comprising a plurality of recrystallized monocrystal regions
US07/553,361 US5011783A (en) 1981-12-28 1990-07-16 Forming selective single crystal regions in insulated pockets formed on silicon by energy beams and devices formed in the pockets

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56211191A JPS58115832A (ja) 1981-12-28 1981-12-28 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58115832A true JPS58115832A (ja) 1983-07-09
JPH0345530B2 JPH0345530B2 (enExample) 1991-07-11

Family

ID=16601896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56211191A Granted JPS58115832A (ja) 1981-12-28 1981-12-28 半導体装置の製造方法

Country Status (4)

Country Link
US (1) US5011783A (enExample)
EP (1) EP0084265B1 (enExample)
JP (1) JPS58115832A (enExample)
DE (1) DE3278259D1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0134504B1 (en) * 1983-07-15 1989-05-10 Kabushiki Kaisha Toshiba A c-mos device and process for manufacturing the same

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100189966B1 (ko) * 1995-06-13 1999-06-01 윤종용 소이 구조의 모스 트랜지스터 및 그 제조방법
US5914280A (en) * 1996-12-23 1999-06-22 Harris Corporation Deep trench etch on bonded silicon wafer
US6004835A (en) 1997-04-25 1999-12-21 Micron Technology, Inc. Method of forming integrated circuitry, conductive lines, a conductive grid, a conductive network, an electrical interconnection to anode location and an electrical interconnection with a transistor source/drain region
US5891763A (en) * 1997-10-22 1999-04-06 Wanlass; Frank M. Damascene pattering of SOI MOS transistors

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4174217A (en) * 1974-08-02 1979-11-13 Rca Corporation Method for making semiconductor structure
JPS5530623A (en) * 1978-08-25 1980-03-04 Saburo Wakasugi Vibration sensitive warning device
EP0030286B1 (de) * 1979-11-23 1987-09-09 Alcatel N.V. Dielektrisch isoliertes Halbleiterbauelement und Verfahren zur Herstellung
US4381201A (en) * 1980-03-11 1983-04-26 Fujitsu Limited Method for production of semiconductor devices
JPS56135969A (en) * 1980-03-27 1981-10-23 Fujitsu Ltd Manufacture of semiconductor device
JPS56144577A (en) * 1980-04-10 1981-11-10 Fujitsu Ltd Production of semiconductor device
JPS56160050A (en) * 1980-05-14 1981-12-09 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS577926A (en) * 1980-06-18 1982-01-16 Fujitsu Ltd Manufacture of semiconductor device
US4372990A (en) * 1980-06-23 1983-02-08 Texas Instruments Incorporated Retaining wall technique to maintain physical shape of material during transient radiation annealing
JPS5734331A (en) * 1980-08-11 1982-02-24 Toshiba Corp Manufacture of semiconductor device
US4330363A (en) * 1980-08-28 1982-05-18 Xerox Corporation Thermal gradient control for enhanced laser induced crystallization of predefined semiconductor areas
US4409724A (en) * 1980-11-03 1983-10-18 Texas Instruments Incorporated Method of fabricating display with semiconductor circuits on monolithic structure and flat panel display produced thereby
US4448632A (en) * 1981-05-25 1984-05-15 Mitsubishi Denki Kabushiki Kaisha Method of fabricating semiconductor devices
JPS5891621A (ja) * 1981-11-26 1983-05-31 Mitsubishi Electric Corp 半導体装置の製造方法
US4479847A (en) * 1981-12-30 1984-10-30 California Institute Of Technology Equilibrium crystal growth from substrate confined liquid
US4473433A (en) * 1982-06-18 1984-09-25 At&T Bell Laboratories Process for producing dielectrically isolated single crystal silicon devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0134504B1 (en) * 1983-07-15 1989-05-10 Kabushiki Kaisha Toshiba A c-mos device and process for manufacturing the same

Also Published As

Publication number Publication date
US5011783A (en) 1991-04-30
EP0084265A3 (en) 1985-04-17
JPH0345530B2 (enExample) 1991-07-11
EP0084265A2 (en) 1983-07-27
DE3278259D1 (en) 1988-04-21
EP0084265B1 (en) 1988-03-16

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