JPS58101735A - プラズマｃｖｄ装置 - Google Patents

プラズマｃｖｄ装置

Info

Publication number
JPS58101735A
JPS58101735A JP19960881A JP19960881A JPS58101735A JP S58101735 A JPS58101735 A JP S58101735A JP 19960881 A JP19960881 A JP 19960881A JP 19960881 A JP19960881 A JP 19960881A JP S58101735 A JPS58101735 A JP S58101735A
Authority
JP
Japan
Prior art keywords
drum
plasma cvd
electrode
cylindrical
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19960881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0152052B2 (enrdf_load_stackoverflow
Inventor
Yasutomo Fujiyama
藤山　靖朋
Osamu Kamiya
神谷　攻
Kyosuke Ogawa
小川　恭介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP19960881A priority Critical patent/JPS58101735A/ja
Publication of JPS58101735A publication Critical patent/JPS58101735A/ja
Publication of JPH0152052B2 publication Critical patent/JPH0152052B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP19960881A 1981-12-11 1981-12-11 プラズマｃｖｄ装置 Granted JPS58101735A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19960881A JPS58101735A (ja) 1981-12-11 1981-12-11 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19960881A JPS58101735A (ja) 1981-12-11 1981-12-11 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS58101735A true JPS58101735A (ja) 1983-06-17
JPH0152052B2 JPH0152052B2 (enrdf_load_stackoverflow) 1989-11-07

Family

ID=16410685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19960881A Granted JPS58101735A (ja) 1981-12-11 1981-12-11 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS58101735A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024378A (ja) * 1983-07-19 1985-02-07 Kyocera Corp 量産型グロ−放電分解装置
JPS6029470A (ja) * 1983-07-27 1985-02-14 Kyocera Corp 量産型グロ−放電分解装置
JPS6036664A (ja) * 1983-09-26 1985-02-25 Kyocera Corp 量産型グロー放電分解装置
JPS6088955A (ja) * 1983-10-21 1985-05-18 Stanley Electric Co Ltd プラズマｃｖｄ装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024378A (ja) * 1983-07-19 1985-02-07 Kyocera Corp 量産型グロ−放電分解装置
JPS6029470A (ja) * 1983-07-27 1985-02-14 Kyocera Corp 量産型グロ−放電分解装置
JPS6036664A (ja) * 1983-09-26 1985-02-25 Kyocera Corp 量産型グロー放電分解装置
JPS6088955A (ja) * 1983-10-21 1985-05-18 Stanley Electric Co Ltd プラズマｃｖｄ装置

Also Published As

Publication number Publication date
JPH0152052B2 (enrdf_load_stackoverflow) 1989-11-07

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