JPS5787178A - Semiconductor device and manufacture thereof - Google Patents

Semiconductor device and manufacture thereof

Info

Publication number
JPS5787178A
JPS5787178A JP55163695A JP16369580A JPS5787178A JP S5787178 A JPS5787178 A JP S5787178A JP 55163695 A JP55163695 A JP 55163695A JP 16369580 A JP16369580 A JP 16369580A JP S5787178 A JPS5787178 A JP S5787178A
Authority
JP
Japan
Prior art keywords
electrode
layer
spacer
aluminum
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55163695A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336148B2 (enrdf_load_stackoverflow
Inventor
Toshiki Ehata
Hideki Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP55163695A priority Critical patent/JPS5787178A/ja
Publication of JPS5787178A publication Critical patent/JPS5787178A/ja
Publication of JPS6336148B2 publication Critical patent/JPS6336148B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP55163695A 1980-11-19 1980-11-19 Semiconductor device and manufacture thereof Granted JPS5787178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55163695A JPS5787178A (en) 1980-11-19 1980-11-19 Semiconductor device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55163695A JPS5787178A (en) 1980-11-19 1980-11-19 Semiconductor device and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS5787178A true JPS5787178A (en) 1982-05-31
JPS6336148B2 JPS6336148B2 (enrdf_load_stackoverflow) 1988-07-19

Family

ID=15778844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55163695A Granted JPS5787178A (en) 1980-11-19 1980-11-19 Semiconductor device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5787178A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248478A (en) * 1975-10-16 1977-04-18 Fujitsu Ltd Process for production of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248478A (en) * 1975-10-16 1977-04-18 Fujitsu Ltd Process for production of semiconductor device

Also Published As

Publication number Publication date
JPS6336148B2 (enrdf_load_stackoverflow) 1988-07-19

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