JPS5775412A - Manufacture of thin film - Google Patents
Manufacture of thin filmInfo
- Publication number
- JPS5775412A JPS5775412A JP15147680A JP15147680A JPS5775412A JP S5775412 A JPS5775412 A JP S5775412A JP 15147680 A JP15147680 A JP 15147680A JP 15147680 A JP15147680 A JP 15147680A JP S5775412 A JPS5775412 A JP S5775412A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- anode
- cathode
- voltage
- vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Magnetic Films (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15147680A JPS5775412A (en) | 1980-10-30 | 1980-10-30 | Manufacture of thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15147680A JPS5775412A (en) | 1980-10-30 | 1980-10-30 | Manufacture of thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5775412A true JPS5775412A (en) | 1982-05-12 |
JPH033363B2 JPH033363B2 (enrdf_load_stackoverflow) | 1991-01-18 |
Family
ID=15519339
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15147680A Granted JPS5775412A (en) | 1980-10-30 | 1980-10-30 | Manufacture of thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5775412A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5941821A (ja) * | 1982-09-02 | 1984-03-08 | Nippon Hoso Kyokai <Nhk> | 光磁気記録用非晶質磁性多層膜の製造方法 |
JPS6035503A (ja) * | 1983-05-11 | 1985-02-23 | ムービッド インフォメーション テクノロジー インコーポレイテッド | 小さい安定な磁区を作る熱磁気記録材料 |
JPS61240434A (ja) * | 1985-04-18 | 1986-10-25 | Seiko Epson Corp | 磁性薄膜の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5163492A (en) * | 1974-11-29 | 1976-06-01 | Kokusai Denshin Denwa Co Ltd | Jiseiusumakuno seizohoho |
JPS5175677A (en) * | 1974-12-27 | 1976-06-30 | Inoue Japax Res | Ion supatsuta pureiteingusochi |
-
1980
- 1980-10-30 JP JP15147680A patent/JPS5775412A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5163492A (en) * | 1974-11-29 | 1976-06-01 | Kokusai Denshin Denwa Co Ltd | Jiseiusumakuno seizohoho |
JPS5175677A (en) * | 1974-12-27 | 1976-06-30 | Inoue Japax Res | Ion supatsuta pureiteingusochi |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5941821A (ja) * | 1982-09-02 | 1984-03-08 | Nippon Hoso Kyokai <Nhk> | 光磁気記録用非晶質磁性多層膜の製造方法 |
JPS6035503A (ja) * | 1983-05-11 | 1985-02-23 | ムービッド インフォメーション テクノロジー インコーポレイテッド | 小さい安定な磁区を作る熱磁気記録材料 |
JPS61240434A (ja) * | 1985-04-18 | 1986-10-25 | Seiko Epson Corp | 磁性薄膜の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH033363B2 (enrdf_load_stackoverflow) | 1991-01-18 |
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