JPS5775412A - Manufacture of thin film - Google Patents

Manufacture of thin film

Info

Publication number
JPS5775412A
JPS5775412A JP15147680A JP15147680A JPS5775412A JP S5775412 A JPS5775412 A JP S5775412A JP 15147680 A JP15147680 A JP 15147680A JP 15147680 A JP15147680 A JP 15147680A JP S5775412 A JPS5775412 A JP S5775412A
Authority
JP
Japan
Prior art keywords
thin film
anode
cathode
voltage
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15147680A
Other languages
Japanese (ja)
Other versions
JPH033363B2 (en
Inventor
Yuji Togami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Broadcasting Corp
Original Assignee
Nippon Hoso Kyokai NHK
Japan Broadcasting Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Hoso Kyokai NHK, Japan Broadcasting Corp filed Critical Nippon Hoso Kyokai NHK
Priority to JP15147680A priority Critical patent/JPS5775412A/en
Publication of JPS5775412A publication Critical patent/JPS5775412A/en
Publication of JPH033363B2 publication Critical patent/JPH033363B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To equalize quantity of oxygen contained in a thin film to contrive to enhance uniformity of magnetic property of the thin film by a method wherein a negative bias voltage in relation to an anode electrode is applied constantly to the conductive thin film during performance of sputtering. CONSTITUTION:A stainless vacuum vessel 11 is connected air-tightly to a cathode 12, a substrate holder 13 respectively through ring type insulators 14, 15. A target 16 is fixed to the cathode, and a glass substrate 17 is fixed to the substrate holder 13 through a conductive terminal 19 or directly. Moreover an electric power source 21 for voltage between anode and cathode is connected as to apply a DC high voltage being piled up with a high-frequency voltage between the cathode 12 making the stainless vessel 11 as the anode. The vessel 11 to constitute the anode is earthed, and a negative bias voltage in relation to the anode votage is applied to the holder 13 by an electric power source 22 for bias. Accordingly quantity of oxygen in the thin film can be equalized easily, and magnetic characteristic can be nearly equalized extending over the large area.
JP15147680A 1980-10-30 1980-10-30 Manufacture of thin film Granted JPS5775412A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15147680A JPS5775412A (en) 1980-10-30 1980-10-30 Manufacture of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15147680A JPS5775412A (en) 1980-10-30 1980-10-30 Manufacture of thin film

Publications (2)

Publication Number Publication Date
JPS5775412A true JPS5775412A (en) 1982-05-12
JPH033363B2 JPH033363B2 (en) 1991-01-18

Family

ID=15519339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15147680A Granted JPS5775412A (en) 1980-10-30 1980-10-30 Manufacture of thin film

Country Status (1)

Country Link
JP (1) JPS5775412A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941821A (en) * 1982-09-02 1984-03-08 Nippon Hoso Kyokai <Nhk> Amorphous magnetic multilayer thin-film
JPS6035503A (en) * 1983-05-11 1985-02-23 ムービッド　インフォメーション　テクノロジー　インコーポレイテッド Thermal magnetic recording material for making small stable magnetic domain
JPS61240434A (en) * 1985-04-18 1986-10-25 Seiko Epson Corp Production of magnetic thin film

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5163492A (en) * 1974-11-29 1976-06-01 Kokusai Denshin Denwa Co Ltd Jiseiusumakuno seizohoho
JPS5175677A (en) * 1974-12-27 1976-06-30 Inoue Japax Res Ion supatsuta pureiteingusochi

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5163492A (en) * 1974-11-29 1976-06-01 Kokusai Denshin Denwa Co Ltd Jiseiusumakuno seizohoho
JPS5175677A (en) * 1974-12-27 1976-06-30 Inoue Japax Res Ion supatsuta pureiteingusochi

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941821A (en) * 1982-09-02 1984-03-08 Nippon Hoso Kyokai <Nhk> Amorphous magnetic multilayer thin-film
JPH0324765B2 (en) * 1982-09-02 1991-04-04 Japan Broadcasting Corp
JPS6035503A (en) * 1983-05-11 1985-02-23 ムービッド　インフォメーション　テクノロジー　インコーポレイテッド Thermal magnetic recording material for making small stable magnetic domain
JPS61240434A (en) * 1985-04-18 1986-10-25 Seiko Epson Corp Production of magnetic thin film

Also Published As

Publication number Publication date
JPH033363B2 (en) 1991-01-18

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