JPS5772073A - Voltage measuring device - Google Patents

Voltage measuring device

Info

Publication number
JPS5772073A
JPS5772073A JP55148988A JP14898880A JPS5772073A JP S5772073 A JPS5772073 A JP S5772073A JP 55148988 A JP55148988 A JP 55148988A JP 14898880 A JP14898880 A JP 14898880A JP S5772073 A JPS5772073 A JP S5772073A
Authority
JP
Japan
Prior art keywords
electrode
semispherical
specimen
mesh
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55148988A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0145584B2 (OSRAM
Inventor
Akio Ito
Yoshiaki Goto
Toshihiro Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55148988A priority Critical patent/JPS5772073A/ja
Publication of JPS5772073A publication Critical patent/JPS5772073A/ja
Publication of JPH0145584B2 publication Critical patent/JPH0145584B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)
JP55148988A 1980-10-24 1980-10-24 Voltage measuring device Granted JPS5772073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55148988A JPS5772073A (en) 1980-10-24 1980-10-24 Voltage measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55148988A JPS5772073A (en) 1980-10-24 1980-10-24 Voltage measuring device

Publications (2)

Publication Number Publication Date
JPS5772073A true JPS5772073A (en) 1982-05-06
JPH0145584B2 JPH0145584B2 (OSRAM) 1989-10-04

Family

ID=15465182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55148988A Granted JPS5772073A (en) 1980-10-24 1980-10-24 Voltage measuring device

Country Status (1)

Country Link
JP (1) JPS5772073A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63146336A (ja) * 1986-11-13 1988-06-18 株式会社アドバンテスト 粒子線測定装置のスペクトロメータ対物レンズ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63146336A (ja) * 1986-11-13 1988-06-18 株式会社アドバンテスト 粒子線測定装置のスペクトロメータ対物レンズ

Also Published As

Publication number Publication date
JPH0145584B2 (OSRAM) 1989-10-04

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