JPS57194446A - Charged particle energy analyzer - Google Patents
Charged particle energy analyzerInfo
- Publication number
- JPS57194446A JPS57194446A JP56078473A JP7847381A JPS57194446A JP S57194446 A JPS57194446 A JP S57194446A JP 56078473 A JP56078473 A JP 56078473A JP 7847381 A JP7847381 A JP 7847381A JP S57194446 A JPS57194446 A JP S57194446A
- Authority
- JP
- Japan
- Prior art keywords
- slit
- sample
- electrode
- windows
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE:To increase the brightness without deteriorating the resolution by utilizing not only the electrons emitted from a sample in one direction but also the electrons along a conical face for the energy analysis. CONSTITUTION:A negative voltage is applied to an electrode 1, and an electrode 2 is grounded. The electrodes 1, 2 are disk-shaped, and windows W1, W2 are provided at their centers. Excitation rays X such as the light, X-rays, electron beam, etc. are radiated to a sample 5 from above through the windows W1, W2. Circular slits 3, 4 are provided on the electrode plate 2 coaxially with the window W2. The slit 3 is an incident slit and the slit 4 is a reflection slit, and an electron detector 5 is arranged beneath the reflection slit 4 along the slit 4. All the electrons emitted from the excitation ray emitting point of the sample S at an angle theta with the center line X can be fed into the space between the electrodes 1, 2 through the incident slit 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56078473A JPS57194446A (en) | 1981-05-22 | 1981-05-22 | Charged particle energy analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56078473A JPS57194446A (en) | 1981-05-22 | 1981-05-22 | Charged particle energy analyzer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57194446A true JPS57194446A (en) | 1982-11-30 |
JPH0351054B2 JPH0351054B2 (en) | 1991-08-05 |
Family
ID=13662980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56078473A Granted JPS57194446A (en) | 1981-05-22 | 1981-05-22 | Charged particle energy analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57194446A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4742224A (en) * | 1986-12-22 | 1988-05-03 | American Telephone And Telegraph Company At&T Bell Laboratories | Charged particle energy filter |
EP0554814A1 (en) | 1992-02-03 | 1993-08-11 | Forschungszentrum Jülich Gmbh | Electrostatic deflection with a generally cylindrical shape |
JP2007248081A (en) * | 2006-03-14 | 2007-09-27 | Kyoto Univ | Device and method for generating photon beam |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5028393A (en) * | 1973-05-08 | 1975-03-22 | ||
JPS5135388A (en) * | 1974-09-20 | 1976-03-25 | Hitachi Ltd |
-
1981
- 1981-05-22 JP JP56078473A patent/JPS57194446A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5028393A (en) * | 1973-05-08 | 1975-03-22 | ||
JPS5135388A (en) * | 1974-09-20 | 1976-03-25 | Hitachi Ltd |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4742224A (en) * | 1986-12-22 | 1988-05-03 | American Telephone And Telegraph Company At&T Bell Laboratories | Charged particle energy filter |
EP0554814A1 (en) | 1992-02-03 | 1993-08-11 | Forschungszentrum Jülich Gmbh | Electrostatic deflection with a generally cylindrical shape |
US5357107A (en) * | 1992-02-03 | 1994-10-18 | Forschungszentrum Julich Gmbh | Electrostatic deflector with generally cylindrical configuration |
EP0554814B1 (en) * | 1992-02-03 | 2001-06-20 | Forschungszentrum Jülich Gmbh | Electrostatic deflection with a generally cylindrical shape |
JP2007248081A (en) * | 2006-03-14 | 2007-09-27 | Kyoto Univ | Device and method for generating photon beam |
Also Published As
Publication number | Publication date |
---|---|
JPH0351054B2 (en) | 1991-08-05 |
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