JPS57194446A - Charged particle energy analyzer - Google Patents

Charged particle energy analyzer

Info

Publication number
JPS57194446A
JPS57194446A JP56078473A JP7847381A JPS57194446A JP S57194446 A JPS57194446 A JP S57194446A JP 56078473 A JP56078473 A JP 56078473A JP 7847381 A JP7847381 A JP 7847381A JP S57194446 A JPS57194446 A JP S57194446A
Authority
JP
Japan
Prior art keywords
slit
sample
electrode
windows
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56078473A
Other languages
Japanese (ja)
Other versions
JPH0351054B2 (en
Inventor
Tadamata Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP56078473A priority Critical patent/JPS57194446A/en
Publication of JPS57194446A publication Critical patent/JPS57194446A/en
Publication of JPH0351054B2 publication Critical patent/JPH0351054B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46Static spectrometers
    • H01J49/48Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To increase the brightness without deteriorating the resolution by utilizing not only the electrons emitted from a sample in one direction but also the electrons along a conical face for the energy analysis. CONSTITUTION:A negative voltage is applied to an electrode 1, and an electrode 2 is grounded. The electrodes 1, 2 are disk-shaped, and windows W1, W2 are provided at their centers. Excitation rays X such as the light, X-rays, electron beam, etc. are radiated to a sample 5 from above through the windows W1, W2. Circular slits 3, 4 are provided on the electrode plate 2 coaxially with the window W2. The slit 3 is an incident slit and the slit 4 is a reflection slit, and an electron detector 5 is arranged beneath the reflection slit 4 along the slit 4. All the electrons emitted from the excitation ray emitting point of the sample S at an angle theta with the center line X can be fed into the space between the electrodes 1, 2 through the incident slit 3.
JP56078473A 1981-05-22 1981-05-22 Charged particle energy analyzer Granted JPS57194446A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56078473A JPS57194446A (en) 1981-05-22 1981-05-22 Charged particle energy analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56078473A JPS57194446A (en) 1981-05-22 1981-05-22 Charged particle energy analyzer

Publications (2)

Publication Number Publication Date
JPS57194446A true JPS57194446A (en) 1982-11-30
JPH0351054B2 JPH0351054B2 (en) 1991-08-05

Family

ID=13662980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56078473A Granted JPS57194446A (en) 1981-05-22 1981-05-22 Charged particle energy analyzer

Country Status (1)

Country Link
JP (1) JPS57194446A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4742224A (en) * 1986-12-22 1988-05-03 American Telephone And Telegraph Company At&T Bell Laboratories Charged particle energy filter
EP0554814A1 (en) 1992-02-03 1993-08-11 Forschungszentrum Jülich Gmbh Electrostatic deflection with a generally cylindrical shape
JP2007248081A (en) * 2006-03-14 2007-09-27 Kyoto Univ Device and method for generating photon beam

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028393A (en) * 1973-05-08 1975-03-22
JPS5135388A (en) * 1974-09-20 1976-03-25 Hitachi Ltd

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028393A (en) * 1973-05-08 1975-03-22
JPS5135388A (en) * 1974-09-20 1976-03-25 Hitachi Ltd

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4742224A (en) * 1986-12-22 1988-05-03 American Telephone And Telegraph Company At&T Bell Laboratories Charged particle energy filter
EP0554814A1 (en) 1992-02-03 1993-08-11 Forschungszentrum Jülich Gmbh Electrostatic deflection with a generally cylindrical shape
US5357107A (en) * 1992-02-03 1994-10-18 Forschungszentrum Julich Gmbh Electrostatic deflector with generally cylindrical configuration
EP0554814B1 (en) * 1992-02-03 2001-06-20 Forschungszentrum Jülich Gmbh Electrostatic deflection with a generally cylindrical shape
JP2007248081A (en) * 2006-03-14 2007-09-27 Kyoto Univ Device and method for generating photon beam

Also Published As

Publication number Publication date
JPH0351054B2 (en) 1991-08-05

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