JPS5135388A - - Google Patents

Info

Publication number
JPS5135388A
JPS5135388A JP49107816A JP10781674A JPS5135388A JP S5135388 A JPS5135388 A JP S5135388A JP 49107816 A JP49107816 A JP 49107816A JP 10781674 A JP10781674 A JP 10781674A JP S5135388 A JPS5135388 A JP S5135388A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49107816A
Other languages
Japanese (ja)
Inventor
Hisashi Tsuyama
Toshasu Ito
Shunriku Taya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP49107816A priority Critical patent/JPS5135388A/ja
Publication of JPS5135388A publication Critical patent/JPS5135388A/ja
Pending legal-status Critical Current

Links

JP49107816A 1974-09-20 1974-09-20 Pending JPS5135388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49107816A JPS5135388A (en) 1974-09-20 1974-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49107816A JPS5135388A (en) 1974-09-20 1974-09-20

Publications (1)

Publication Number Publication Date
JPS5135388A true JPS5135388A (en) 1976-03-25

Family

ID=14468748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49107816A Pending JPS5135388A (en) 1974-09-20 1974-09-20

Country Status (1)

Country Link
JP (1) JPS5135388A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5395859A (en) * 1977-02-02 1978-08-22 Sumitomo Metal Ind Ltd Tandem hot mill
JPS57194446A (en) * 1981-05-22 1982-11-30 Shimadzu Corp Charged particle energy analyzer
CN102484027A (en) * 2009-07-17 2012-05-30 克拉-坦科股份有限公司 Charged-particle Energy Analyzer
EP2726906A4 (en) * 2011-06-30 2015-07-01 Kla Tencor Corp Background reduction system including louver

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5395859A (en) * 1977-02-02 1978-08-22 Sumitomo Metal Ind Ltd Tandem hot mill
JPS5731486B2 (en) * 1977-02-02 1982-07-05
JPS57194446A (en) * 1981-05-22 1982-11-30 Shimadzu Corp Charged particle energy analyzer
JPH0351054B2 (en) * 1981-05-22 1991-08-05 Shimadzu Corp
CN102484027A (en) * 2009-07-17 2012-05-30 克拉-坦科股份有限公司 Charged-particle Energy Analyzer
JP2012533855A (en) * 2009-07-17 2012-12-27 ケーエルエー−テンカー・コーポレーション Charged particle energy analyzer
EP2726906A4 (en) * 2011-06-30 2015-07-01 Kla Tencor Corp Background reduction system including louver

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