JPS5765659A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS5765659A
JPS5765659A JP55141030A JP14103080A JPS5765659A JP S5765659 A JPS5765659 A JP S5765659A JP 55141030 A JP55141030 A JP 55141030A JP 14103080 A JP14103080 A JP 14103080A JP S5765659 A JPS5765659 A JP S5765659A
Authority
JP
Japan
Prior art keywords
signal
indicating
objective lens
function
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55141030A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444380B2 (enrdf_load_stackoverflow
Inventor
Hatsujirou Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP55141030A priority Critical patent/JPS5765659A/ja
Publication of JPS5765659A publication Critical patent/JPS5765659A/ja
Publication of JPH0444380B2 publication Critical patent/JPH0444380B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP55141030A 1980-10-08 1980-10-08 Electron microscope Granted JPS5765659A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55141030A JPS5765659A (en) 1980-10-08 1980-10-08 Electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55141030A JPS5765659A (en) 1980-10-08 1980-10-08 Electron microscope

Publications (2)

Publication Number Publication Date
JPS5765659A true JPS5765659A (en) 1982-04-21
JPH0444380B2 JPH0444380B2 (enrdf_load_stackoverflow) 1992-07-21

Family

ID=15282576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55141030A Granted JPS5765659A (en) 1980-10-08 1980-10-08 Electron microscope

Country Status (1)

Country Link
JP (1) JPS5765659A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982257A (ja) * 1995-09-14 1997-03-28 Toshiba Corp 荷電粒子光学鏡筒における非点収差の補正及び焦点合わせ方法
JP2002373611A (ja) * 2001-06-15 2002-12-26 Inst Of Physical & Chemical Res 電子顕微鏡及びその焦点位置制御方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982257A (ja) * 1995-09-14 1997-03-28 Toshiba Corp 荷電粒子光学鏡筒における非点収差の補正及び焦点合わせ方法
JP2002373611A (ja) * 2001-06-15 2002-12-26 Inst Of Physical & Chemical Res 電子顕微鏡及びその焦点位置制御方法

Also Published As

Publication number Publication date
JPH0444380B2 (enrdf_load_stackoverflow) 1992-07-21

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