JPS5663761A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS5663761A
JPS5663761A JP13829479A JP13829479A JPS5663761A JP S5663761 A JPS5663761 A JP S5663761A JP 13829479 A JP13829479 A JP 13829479A JP 13829479 A JP13829479 A JP 13829479A JP S5663761 A JPS5663761 A JP S5663761A
Authority
JP
Japan
Prior art keywords
magnetic field
sample
electron beam
domain
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13829479A
Other languages
Japanese (ja)
Other versions
JPS597183B2 (en
Inventor
Yoshinori Aoki
Toshikazu Honda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP54138294A priority Critical patent/JPS597183B2/en
Publication of JPS5663761A publication Critical patent/JPS5663761A/en
Publication of JPS597183B2 publication Critical patent/JPS597183B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To obtain an electron microscope which is suitable for watching a domain by applying an alternate magnetic field whose strength changes in a rectangular pulse shape to a magnetic sample and separately displaying a domain image in the magnetic field impression status of each strength. CONSTITUTION:An electron beam 2 from an electron gun 1 is incident on a magnetic sample 5 along on optical axis 4 through a convergent lens 3. An alternate magnetic field whose strength changes in a rectangular shape is applied to the sample 5 by a coil to which square wave current is supplied and its transparent electron beam is deflected. Then this deflection is corrected by a correction magnetic field impression means 8 and the electron beam readvances on an optical axis 4. After the electron beam pases through an object lens 10, it is separated by an image separation coil 11 to which a square pulse shape current is applied and recorded on a film 12. As a result, when the alternate magnetic field is applied to the sample 5, three types of magnified images can be obtained. By comparing these images, the movement of a domain can be watched.
JP54138294A 1979-10-26 1979-10-26 electronic microscope Expired JPS597183B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54138294A JPS597183B2 (en) 1979-10-26 1979-10-26 electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54138294A JPS597183B2 (en) 1979-10-26 1979-10-26 electronic microscope

Publications (2)

Publication Number Publication Date
JPS5663761A true JPS5663761A (en) 1981-05-30
JPS597183B2 JPS597183B2 (en) 1984-02-16

Family

ID=15218516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54138294A Expired JPS597183B2 (en) 1979-10-26 1979-10-26 electronic microscope

Country Status (1)

Country Link
JP (1) JPS597183B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017208560A1 (en) * 2016-05-31 2017-12-07 株式会社日立製作所 Electron microscope for magnetic field measurement and magnetic field measurement method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017208560A1 (en) * 2016-05-31 2017-12-07 株式会社日立製作所 Electron microscope for magnetic field measurement and magnetic field measurement method
US10629410B2 (en) 2016-05-31 2020-04-21 Hitachi, Ltd. Electron microscope for magnetic field measurement and magnetic field measurement method

Also Published As

Publication number Publication date
JPS597183B2 (en) 1984-02-16

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