JPH0444380B2 - - Google Patents
Info
- Publication number
- JPH0444380B2 JPH0444380B2 JP55141030A JP14103080A JPH0444380B2 JP H0444380 B2 JPH0444380 B2 JP H0444380B2 JP 55141030 A JP55141030 A JP 55141030A JP 14103080 A JP14103080 A JP 14103080A JP H0444380 B2 JPH0444380 B2 JP H0444380B2
- Authority
- JP
- Japan
- Prior art keywords
- function
- objective lens
- phase contrast
- diffraction image
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 19
- 238000003384 imaging method Methods 0.000 claims description 16
- 230000005284 excitation Effects 0.000 claims description 13
- 230000004075 alteration Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 4
- 238000001000 micrograph Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 201000009310 astigmatism Diseases 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55141030A JPS5765659A (en) | 1980-10-08 | 1980-10-08 | Electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55141030A JPS5765659A (en) | 1980-10-08 | 1980-10-08 | Electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5765659A JPS5765659A (en) | 1982-04-21 |
| JPH0444380B2 true JPH0444380B2 (enrdf_load_stackoverflow) | 1992-07-21 |
Family
ID=15282576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55141030A Granted JPS5765659A (en) | 1980-10-08 | 1980-10-08 | Electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5765659A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3402868B2 (ja) * | 1995-09-14 | 2003-05-06 | 株式会社東芝 | 荷電粒子光学鏡筒における非点収差の補正及び焦点合わせ方法 |
| JP3645198B2 (ja) * | 2001-06-15 | 2005-05-11 | 独立行政法人理化学研究所 | 電子顕微鏡及びその焦点位置制御方法 |
-
1980
- 1980-10-08 JP JP55141030A patent/JPS5765659A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5765659A (en) | 1982-04-21 |
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