JPS5758352A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5758352A
JPS5758352A JP55132862A JP13286280A JPS5758352A JP S5758352 A JPS5758352 A JP S5758352A JP 55132862 A JP55132862 A JP 55132862A JP 13286280 A JP13286280 A JP 13286280A JP S5758352 A JPS5758352 A JP S5758352A
Authority
JP
Japan
Prior art keywords
layer
mask
film
psg
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55132862A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0136256B2 (enrdf_load_stackoverflow
Inventor
Katsumi Ogiue
Toshio Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP55132862A priority Critical patent/JPS5758352A/ja
Publication of JPS5758352A publication Critical patent/JPS5758352A/ja
Publication of JPH0136256B2 publication Critical patent/JPH0136256B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • H10D84/0116—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including integrated injection logic [I2L]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP55132862A 1980-09-26 1980-09-26 Manufacture of semiconductor device Granted JPS5758352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55132862A JPS5758352A (en) 1980-09-26 1980-09-26 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55132862A JPS5758352A (en) 1980-09-26 1980-09-26 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5758352A true JPS5758352A (en) 1982-04-08
JPH0136256B2 JPH0136256B2 (enrdf_load_stackoverflow) 1989-07-31

Family

ID=15091268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55132862A Granted JPS5758352A (en) 1980-09-26 1980-09-26 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5758352A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003033306A (ja) * 2001-07-24 2003-02-04 Sanyo Electric Co Ltd 電気掃除機用床用吸込具
US8387206B2 (en) 2009-07-16 2013-03-05 Dyson Technology Limited Surface treating head
US8387207B2 (en) 2009-07-16 2013-03-05 Dyson Technology Limited Surface treating head
US8424157B2 (en) 2009-06-17 2013-04-23 Dyson Technology Limited Tool for a surface treating appliance
US8468647B2 (en) 2009-03-12 2013-06-25 Dyson Technology Limited Surface treating head

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5470781A (en) * 1977-11-16 1979-06-06 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and its manufacture
JPS5474381A (en) * 1977-11-25 1979-06-14 Nec Corp Manufacture of injection type logic circuit
JPS5556644A (en) * 1978-10-20 1980-04-25 Toshiba Corp Manufacture of semiconductor integrated circuit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5470781A (en) * 1977-11-16 1979-06-06 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and its manufacture
JPS5474381A (en) * 1977-11-25 1979-06-14 Nec Corp Manufacture of injection type logic circuit
JPS5556644A (en) * 1978-10-20 1980-04-25 Toshiba Corp Manufacture of semiconductor integrated circuit

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003033306A (ja) * 2001-07-24 2003-02-04 Sanyo Electric Co Ltd 電気掃除機用床用吸込具
US8468647B2 (en) 2009-03-12 2013-06-25 Dyson Technology Limited Surface treating head
US8544145B2 (en) 2009-03-12 2013-10-01 Dyson Technology Limited Surface treating head
US8424157B2 (en) 2009-06-17 2013-04-23 Dyson Technology Limited Tool for a surface treating appliance
US8387206B2 (en) 2009-07-16 2013-03-05 Dyson Technology Limited Surface treating head
US8387207B2 (en) 2009-07-16 2013-03-05 Dyson Technology Limited Surface treating head

Also Published As

Publication number Publication date
JPH0136256B2 (enrdf_load_stackoverflow) 1989-07-31

Similar Documents

Publication Publication Date Title
GB1573496A (en) Bipolar transistors and method of manufacturing the same
JPS57139965A (en) Manufacture of semiconductor device
JPS5758356A (en) Manufacture of semiconductor device
JPS5758352A (en) Manufacture of semiconductor device
KR970052995A (ko) 반도체소자의 트리플웰 형성방법
JPS57155769A (en) Manufacture of semiconductor device
JPS56138920A (en) Method of selection and diffusion for impurities
JPS5736879A (en) Manufacture of semiconductor device
JPS5660015A (en) Manufacture of semiconductor device
JPS55153344A (en) Manufacture of semiconductor device
US4037309A (en) Methods for making transistor structures
JPS57173956A (en) Manufacture of semiconductor device
JPS56126957A (en) Manufacture of semiconductor device
JPS5610959A (en) Manufacture of semiconductor device
JPS5745256A (en) Manufacture of semiconductor device
KR970003735B1 (ko) 바이폴라 집적회로 제조방법
JPS55132053A (en) Manufacture of semiconductor device
JPS56158475A (en) Manufacture of semiconductor device
JPS57181157A (en) Manufacture of semiconductor integrated circuit device
JPS57173972A (en) Manufacture of semiconductor ic device
JPS57199236A (en) Manufacture of oxide film isolation semiconductor device
JPS562651A (en) Manufacture of semiconductor device
JPS6484662A (en) Manufacture of semiconductor device
JPS56104470A (en) Semiconductor device and manufacture thereof
JPS5753976A (en) Manufacture of bipolar transistor