JPS5758338A - Semiconductor integrated device - Google Patents

Semiconductor integrated device

Info

Publication number
JPS5758338A
JPS5758338A JP13305780A JP13305780A JPS5758338A JP S5758338 A JPS5758338 A JP S5758338A JP 13305780 A JP13305780 A JP 13305780A JP 13305780 A JP13305780 A JP 13305780A JP S5758338 A JPS5758338 A JP S5758338A
Authority
JP
Japan
Prior art keywords
film
substrate
wires
groove
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13305780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262466B2 (enrdf_load_stackoverflow
Inventor
Shigeru Kawamata
Yoshitaka Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13305780A priority Critical patent/JPS5758338A/ja
Publication of JPS5758338A publication Critical patent/JPS5758338A/ja
Publication of JPS6262466B2 publication Critical patent/JPS6262466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP13305780A 1980-09-26 1980-09-26 Semiconductor integrated device Granted JPS5758338A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13305780A JPS5758338A (en) 1980-09-26 1980-09-26 Semiconductor integrated device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13305780A JPS5758338A (en) 1980-09-26 1980-09-26 Semiconductor integrated device

Publications (2)

Publication Number Publication Date
JPS5758338A true JPS5758338A (en) 1982-04-08
JPS6262466B2 JPS6262466B2 (enrdf_load_stackoverflow) 1987-12-26

Family

ID=15095808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13305780A Granted JPS5758338A (en) 1980-09-26 1980-09-26 Semiconductor integrated device

Country Status (1)

Country Link
JP (1) JPS5758338A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58218141A (ja) * 1982-06-11 1983-12-19 Hitachi Ltd 高耐圧半導体集積装置
JPS6095939A (ja) * 1983-10-31 1985-05-29 Matsushita Electronics Corp 半導体集積回路の製造方法
US4923820A (en) * 1985-09-18 1990-05-08 Harris Corporation IC which eliminates support bias influence on dielectrically isolated components
JPH053192A (ja) * 1991-10-25 1993-01-08 Matsushita Electron Corp 半導体集積回路
US5426073A (en) * 1988-10-07 1995-06-20 Fujitsu Limited Method of fabricating semiconductor devices using an intermediate grinding step

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58218141A (ja) * 1982-06-11 1983-12-19 Hitachi Ltd 高耐圧半導体集積装置
JPS6095939A (ja) * 1983-10-31 1985-05-29 Matsushita Electronics Corp 半導体集積回路の製造方法
US4923820A (en) * 1985-09-18 1990-05-08 Harris Corporation IC which eliminates support bias influence on dielectrically isolated components
US5426073A (en) * 1988-10-07 1995-06-20 Fujitsu Limited Method of fabricating semiconductor devices using an intermediate grinding step
JPH053192A (ja) * 1991-10-25 1993-01-08 Matsushita Electron Corp 半導体集積回路

Also Published As

Publication number Publication date
JPS6262466B2 (enrdf_load_stackoverflow) 1987-12-26

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