JPS55138857A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS55138857A JPS55138857A JP4741679A JP4741679A JPS55138857A JP S55138857 A JPS55138857 A JP S55138857A JP 4741679 A JP4741679 A JP 4741679A JP 4741679 A JP4741679 A JP 4741679A JP S55138857 A JPS55138857 A JP S55138857A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- wiring layer
- aluminum
- silicon
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To prevent the disconnection of an aluminum wire and to enhance the reliability of a semiconductor device by forming an insulating layer made of silicon nitride on the surface of a semiconductor substrate and a metallic wiring layer and coating phosphorus, silicon, glass on the surface of the metallic wiring layer. CONSTITUTION:A field oxide film 7 is formed on a p-type silicon substrate 1, and a gate insulating film 6 and a gate electrode 5 made of polycrystalline silicon are selectively formed thereon. A PSG film 8 is then formed on the surface of the substrate 1 to form a source region 9, a drain region 10 and an aluminum wiring layer 2 thereon. Thereafter, a silicon nitride layer 13 is formed as an insulating film between the wiring layers by a CVD process, openings for connecting between the layers are perforated, the second aluminum layer is then formed thereon, and patterned to form the second aluminum wiring layer 3 thereon.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4741679A JPS55138857A (en) | 1979-04-18 | 1979-04-18 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4741679A JPS55138857A (en) | 1979-04-18 | 1979-04-18 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55138857A true JPS55138857A (en) | 1980-10-30 |
Family
ID=12774537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4741679A Pending JPS55138857A (en) | 1979-04-18 | 1979-04-18 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55138857A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5349970A (en) * | 1976-10-18 | 1978-05-06 | Hitachi Ltd | Semiconductor device |
JPS5411688A (en) * | 1977-06-27 | 1979-01-27 | Fujitsu Ltd | Manufacture for semiconductor device |
-
1979
- 1979-04-18 JP JP4741679A patent/JPS55138857A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5349970A (en) * | 1976-10-18 | 1978-05-06 | Hitachi Ltd | Semiconductor device |
JPS5411688A (en) * | 1977-06-27 | 1979-01-27 | Fujitsu Ltd | Manufacture for semiconductor device |
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