JPS5756950A - Manufacture of insulated gate tupe semiconductor integrated ciucuit device - Google Patents

Manufacture of insulated gate tupe semiconductor integrated ciucuit device

Info

Publication number
JPS5756950A
JPS5756950A JP207981A JP207981A JPS5756950A JP S5756950 A JPS5756950 A JP S5756950A JP 207981 A JP207981 A JP 207981A JP 207981 A JP207981 A JP 207981A JP S5756950 A JPS5756950 A JP S5756950A
Authority
JP
Japan
Prior art keywords
wire
electrode
shielding
fets
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP207981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5751261B2 (enrdf_load_stackoverflow
Inventor
Hirohito Kawagoe
Masahiro Kataoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP207981A priority Critical patent/JPS5756950A/ja
Publication of JPS5756950A publication Critical patent/JPS5756950A/ja
Publication of JPS5751261B2 publication Critical patent/JPS5751261B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP207981A 1981-01-12 1981-01-12 Manufacture of insulated gate tupe semiconductor integrated ciucuit device Granted JPS5756950A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP207981A JPS5756950A (en) 1981-01-12 1981-01-12 Manufacture of insulated gate tupe semiconductor integrated ciucuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP207981A JPS5756950A (en) 1981-01-12 1981-01-12 Manufacture of insulated gate tupe semiconductor integrated ciucuit device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5073772A Division JPS558814B2 (enrdf_load_stackoverflow) 1972-05-24 1972-05-24

Publications (2)

Publication Number Publication Date
JPS5756950A true JPS5756950A (en) 1982-04-05
JPS5751261B2 JPS5751261B2 (enrdf_load_stackoverflow) 1982-11-01

Family

ID=11519333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP207981A Granted JPS5756950A (en) 1981-01-12 1981-01-12 Manufacture of insulated gate tupe semiconductor integrated ciucuit device

Country Status (1)

Country Link
JP (1) JPS5756950A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01170032A (ja) * 1986-12-03 1989-07-05 Philips Gloeilampenfab:Nv 多層配線を有する集積半導体回路
JPH0294455A (ja) * 1988-09-29 1990-04-05 Mitsubishi Electric Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01170032A (ja) * 1986-12-03 1989-07-05 Philips Gloeilampenfab:Nv 多層配線を有する集積半導体回路
JPH0294455A (ja) * 1988-09-29 1990-04-05 Mitsubishi Electric Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5751261B2 (enrdf_load_stackoverflow) 1982-11-01

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