JPS5737851A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5737851A
JPS5737851A JP11418380A JP11418380A JPS5737851A JP S5737851 A JPS5737851 A JP S5737851A JP 11418380 A JP11418380 A JP 11418380A JP 11418380 A JP11418380 A JP 11418380A JP S5737851 A JPS5737851 A JP S5737851A
Authority
JP
Japan
Prior art keywords
film
scribing
alumina
anode
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11418380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6241419B2 (en, 2012
Inventor
Nobuyuki Yamamichi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11418380A priority Critical patent/JPS5737851A/ja
Publication of JPS5737851A publication Critical patent/JPS5737851A/ja
Publication of JPS6241419B2 publication Critical patent/JPS6241419B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Weting (AREA)
JP11418380A 1980-08-20 1980-08-20 Semiconductor device Granted JPS5737851A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11418380A JPS5737851A (en) 1980-08-20 1980-08-20 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11418380A JPS5737851A (en) 1980-08-20 1980-08-20 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5737851A true JPS5737851A (en) 1982-03-02
JPS6241419B2 JPS6241419B2 (en, 2012) 1987-09-02

Family

ID=14631267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11418380A Granted JPS5737851A (en) 1980-08-20 1980-08-20 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5737851A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624321A (ja) * 1985-07-01 1987-01-10 Oki Electric Ind Co Ltd ウエハ−アライメントマ−ク

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498165A (en, 2012) * 1972-05-10 1974-01-24
JPS5117660A (en) * 1974-08-05 1976-02-12 Matsushita Electric Ind Co Ltd Handotaiuehano bunkatsuhoho
JPS52119066A (en) * 1976-03-31 1977-10-06 Mitsubishi Electric Corp Manufacture of semiconductor element
JPS5488092A (en) * 1977-12-26 1979-07-12 Cho Lsi Gijutsu Kenkyu Kumiai Method of fabricating semiconductor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498165A (en, 2012) * 1972-05-10 1974-01-24
JPS5117660A (en) * 1974-08-05 1976-02-12 Matsushita Electric Ind Co Ltd Handotaiuehano bunkatsuhoho
JPS52119066A (en) * 1976-03-31 1977-10-06 Mitsubishi Electric Corp Manufacture of semiconductor element
JPS5488092A (en) * 1977-12-26 1979-07-12 Cho Lsi Gijutsu Kenkyu Kumiai Method of fabricating semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624321A (ja) * 1985-07-01 1987-01-10 Oki Electric Ind Co Ltd ウエハ−アライメントマ−ク

Also Published As

Publication number Publication date
JPS6241419B2 (en, 2012) 1987-09-02

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