JPS5488092A - Method of fabricating semiconductor - Google Patents

Method of fabricating semiconductor

Info

Publication number
JPS5488092A
JPS5488092A JP15684177A JP15684177A JPS5488092A JP S5488092 A JPS5488092 A JP S5488092A JP 15684177 A JP15684177 A JP 15684177A JP 15684177 A JP15684177 A JP 15684177A JP S5488092 A JPS5488092 A JP S5488092A
Authority
JP
Japan
Prior art keywords
fabricating semiconductor
fabricating
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15684177A
Other languages
Japanese (ja)
Inventor
Shiyouhei Shima
Iwao Higashinakagaha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP15684177A priority Critical patent/JPS5488092A/en
Publication of JPS5488092A publication Critical patent/JPS5488092A/en
Pending legal-status Critical Current

Links

JP15684177A 1977-12-26 1977-12-26 Method of fabricating semiconductor Pending JPS5488092A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15684177A JPS5488092A (en) 1977-12-26 1977-12-26 Method of fabricating semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15684177A JPS5488092A (en) 1977-12-26 1977-12-26 Method of fabricating semiconductor

Publications (1)

Publication Number Publication Date
JPS5488092A true JPS5488092A (en) 1979-07-12

Family

ID=15636533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15684177A Pending JPS5488092A (en) 1977-12-26 1977-12-26 Method of fabricating semiconductor

Country Status (1)

Country Link
JP (1) JPS5488092A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676535A (en) * 1979-11-27 1981-06-24 Chiyou Lsi Gijutsu Kenkyu Kumiai Anodization of silicon nitride film
JPS5676536A (en) * 1979-11-27 1981-06-24 Chiyou Lsi Gijutsu Kenkyu Kumiai Anodization of silicon nitride film
JPS5737851A (en) * 1980-08-20 1982-03-02 Nec Corp Semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676535A (en) * 1979-11-27 1981-06-24 Chiyou Lsi Gijutsu Kenkyu Kumiai Anodization of silicon nitride film
JPS5676536A (en) * 1979-11-27 1981-06-24 Chiyou Lsi Gijutsu Kenkyu Kumiai Anodization of silicon nitride film
JPH0114701B2 (en) * 1979-11-27 1989-03-14 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai
JPS5737851A (en) * 1980-08-20 1982-03-02 Nec Corp Semiconductor device
JPS6241419B2 (en) * 1980-08-20 1987-09-02 Nippon Electric Co

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