JPS6241419B2 - - Google Patents
Info
- Publication number
- JPS6241419B2 JPS6241419B2 JP55114183A JP11418380A JPS6241419B2 JP S6241419 B2 JPS6241419 B2 JP S6241419B2 JP 55114183 A JP55114183 A JP 55114183A JP 11418380 A JP11418380 A JP 11418380A JP S6241419 B2 JPS6241419 B2 JP S6241419B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- scribe
- aluminum
- alumina film
- scribe area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11418380A JPS5737851A (en) | 1980-08-20 | 1980-08-20 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11418380A JPS5737851A (en) | 1980-08-20 | 1980-08-20 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5737851A JPS5737851A (en) | 1982-03-02 |
| JPS6241419B2 true JPS6241419B2 (en, 2012) | 1987-09-02 |
Family
ID=14631267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11418380A Granted JPS5737851A (en) | 1980-08-20 | 1980-08-20 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5737851A (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0779073B2 (ja) * | 1985-07-01 | 1995-08-23 | 沖電気工業株式会社 | ウエハーアライメントマーク |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS557019B2 (en, 2012) * | 1972-05-10 | 1980-02-21 | ||
| JPS5117660A (en) * | 1974-08-05 | 1976-02-12 | Matsushita Electric Ind Co Ltd | Handotaiuehano bunkatsuhoho |
| JPS52119066A (en) * | 1976-03-31 | 1977-10-06 | Mitsubishi Electric Corp | Manufacture of semiconductor element |
| JPS5488092A (en) * | 1977-12-26 | 1979-07-12 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of fabricating semiconductor |
-
1980
- 1980-08-20 JP JP11418380A patent/JPS5737851A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5737851A (en) | 1982-03-02 |
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