JPS5730528A - Vapor-separating member - Google Patents

Vapor-separating member

Info

Publication number
JPS5730528A
JPS5730528A JP10536480A JP10536480A JPS5730528A JP S5730528 A JPS5730528 A JP S5730528A JP 10536480 A JP10536480 A JP 10536480A JP 10536480 A JP10536480 A JP 10536480A JP S5730528 A JPS5730528 A JP S5730528A
Authority
JP
Japan
Prior art keywords
base material
thin film
plasma
organosilane
jar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10536480A
Other languages
English (en)
Other versions
JPH0258970B2 (ja
Inventor
Masakata Hirai
Jiro Sakata
Yutaka Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP10536480A priority Critical patent/JPS5730528A/ja
Publication of JPS5730528A publication Critical patent/JPS5730528A/ja
Publication of JPH0258970B2 publication Critical patent/JPH0258970B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/125—In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction
    • B01D69/127—In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction using electrical discharge or plasma-polymerisation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
JP10536480A 1980-07-30 1980-07-30 Vapor-separating member Granted JPS5730528A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10536480A JPS5730528A (en) 1980-07-30 1980-07-30 Vapor-separating member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10536480A JPS5730528A (en) 1980-07-30 1980-07-30 Vapor-separating member

Publications (2)

Publication Number Publication Date
JPS5730528A true JPS5730528A (en) 1982-02-18
JPH0258970B2 JPH0258970B2 (ja) 1990-12-11

Family

ID=14405662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10536480A Granted JPS5730528A (en) 1980-07-30 1980-07-30 Vapor-separating member

Country Status (1)

Country Link
JP (1) JPS5730528A (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57150423A (en) * 1981-03-13 1982-09-17 Mitsubishi Chem Ind Ltd Gas separating film
JPS5959214A (ja) * 1982-09-28 1984-04-05 Asahi Glass Co Ltd ガス分離用複合膜
JPS6054707A (ja) * 1983-08-02 1985-03-29 シエル・インタ−ナシヨネイル・リサ−チ・マ−チヤツピイ・ベ−・ウイ 緻密な複合膜
JPS6075320A (ja) * 1983-10-03 1985-04-27 Agency Of Ind Science & Technol ガス選択透過性複合膜およびその製造方法
JPS61111121A (ja) * 1984-11-02 1986-05-29 Toray Ind Inc 気体分離用複合膜
JPS61129008A (ja) * 1984-11-28 1986-06-17 Sanyo Chem Ind Ltd 気体分離用複合膜および製造法
US4696686A (en) * 1984-12-27 1987-09-29 Nippondenso Co., Ltd. Oxygen separating member and process for producing the same
JPH03178318A (ja) * 1989-12-04 1991-08-02 Iwatani Internatl Corp 水素化物系廃ガスの湿式除害方法
WO2005068058A1 (ja) * 2004-01-15 2005-07-28 Sfc Co., Ltd. 水素又はヘリウムの透過膜、貯蔵膜及びその形成方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134129U (ja) * 1974-09-03 1976-03-13
JPS53427U (ja) * 1976-06-22 1978-01-06
JPS531740U (ja) * 1976-06-24 1978-01-10

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134129U (ja) * 1974-09-03 1976-03-13
JPS53427U (ja) * 1976-06-22 1978-01-06
JPS531740U (ja) * 1976-06-24 1978-01-10

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57150423A (en) * 1981-03-13 1982-09-17 Mitsubishi Chem Ind Ltd Gas separating film
JPS5959214A (ja) * 1982-09-28 1984-04-05 Asahi Glass Co Ltd ガス分離用複合膜
JPS6054707A (ja) * 1983-08-02 1985-03-29 シエル・インタ−ナシヨネイル・リサ−チ・マ−チヤツピイ・ベ−・ウイ 緻密な複合膜
JPH0457372B2 (ja) * 1983-08-02 1992-09-11 Sheru Intern Risaachi Maachatsupii Bv
JPH038808B2 (ja) * 1983-10-03 1991-02-07 Kogyo Gijutsuin
JPS6075320A (ja) * 1983-10-03 1985-04-27 Agency Of Ind Science & Technol ガス選択透過性複合膜およびその製造方法
JPS61111121A (ja) * 1984-11-02 1986-05-29 Toray Ind Inc 気体分離用複合膜
JPH0451218B2 (ja) * 1984-11-28 1992-08-18 Sanyo Chemical Ind Ltd
JPS61129008A (ja) * 1984-11-28 1986-06-17 Sanyo Chem Ind Ltd 気体分離用複合膜および製造法
US4696686A (en) * 1984-12-27 1987-09-29 Nippondenso Co., Ltd. Oxygen separating member and process for producing the same
JPH03178318A (ja) * 1989-12-04 1991-08-02 Iwatani Internatl Corp 水素化物系廃ガスの湿式除害方法
WO2005068058A1 (ja) * 2004-01-15 2005-07-28 Sfc Co., Ltd. 水素又はヘリウムの透過膜、貯蔵膜及びその形成方法
JPWO2005068058A1 (ja) * 2004-01-15 2007-12-27 株式会社エス・エフ・シー 水素又はヘリウムの透過膜、貯蔵膜及びその形成方法
KR100858108B1 (ko) * 2004-01-15 2008-09-10 에스에프씨 가부시키가이샤 수소 또는 헬륨 투과막, 저장막 및 그 형성방법
JP4521358B2 (ja) * 2004-01-15 2010-08-11 株式会社エス・エフ・シー 水素又はヘリウムの透過膜、貯蔵膜及びその形成方法

Also Published As

Publication number Publication date
JPH0258970B2 (ja) 1990-12-11

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