JPS5723456A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS5723456A
JPS5723456A JP9857880A JP9857880A JPS5723456A JP S5723456 A JPS5723456 A JP S5723456A JP 9857880 A JP9857880 A JP 9857880A JP 9857880 A JP9857880 A JP 9857880A JP S5723456 A JPS5723456 A JP S5723456A
Authority
JP
Japan
Prior art keywords
semiconductor device
observed
sample table
circuit elements
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9857880A
Other languages
Japanese (ja)
Inventor
Hirokazu Yuasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9857880A priority Critical patent/JPS5723456A/en
Publication of JPS5723456A publication Critical patent/JPS5723456A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To make the generate a fast pattern at a short distance in an inside of a microscope and feed to a semiconductor device without deformation of wave form, by providing circuit elements which constitute required periheral circuit and by operating the semiconductor device. CONSTITUTION:An observed semiconductor device 1 is mounted on a socket 2, fixed on a print substrate 4 together with peripheral circuit elements 3, and wired. The print substrate 4 is mounted on a supporting plate 6 with supporting rods 5, and an engaging metallic member 7 is used to fix the sample table on the goniometer of an electron microscope body. The motion of the sample table can be controlled or observed with connecting terminals 8 remotely. A part of the sample table near to a detector 9 is cut and the peripheral circuit elements are not placed on the part so that the secondary electron detecting efficiency will not decrease. Thus the rapid motion of the semiconductor device can be observed.
JP9857880A 1980-07-18 1980-07-18 Scanning electron microscope Pending JPS5723456A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9857880A JPS5723456A (en) 1980-07-18 1980-07-18 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9857880A JPS5723456A (en) 1980-07-18 1980-07-18 Scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS5723456A true JPS5723456A (en) 1982-02-06

Family

ID=14223539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9857880A Pending JPS5723456A (en) 1980-07-18 1980-07-18 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5723456A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1712814A2 (en) * 2004-01-30 2006-10-18 Nabtesco Corporation Eccentric oscillating-type planetary gear device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1712814A2 (en) * 2004-01-30 2006-10-18 Nabtesco Corporation Eccentric oscillating-type planetary gear device
EP1712814A4 (en) * 2004-01-30 2010-05-26 Nabtesco Corp Eccentric oscillating-type planetary gear device

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