JPS5785232A - Positional matching - Google Patents

Positional matching

Info

Publication number
JPS5785232A
JPS5785232A JP16174380A JP16174380A JPS5785232A JP S5785232 A JPS5785232 A JP S5785232A JP 16174380 A JP16174380 A JP 16174380A JP 16174380 A JP16174380 A JP 16174380A JP S5785232 A JPS5785232 A JP S5785232A
Authority
JP
Japan
Prior art keywords
rays
positional
matching mark
molybdenum
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16174380A
Other languages
Japanese (ja)
Inventor
Sumio Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16174380A priority Critical patent/JPS5785232A/en
Publication of JPS5785232A publication Critical patent/JPS5785232A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To obtain positional information by irradiating a positonal matching mark with electron rays to detect characteristic X-rays of a specific element contained in the positional matching mark. CONSTITUTION:A semiconductor base substance 1, which is the substance to be detected, is held by a holder 4 to control electron beam 5 by a deflector 6 for scanning a positional matching mark on a substrate. Said positional matching mark is formed by, for instance, molybdenum. Characteristic X-rays of molybdenum generating by irradiating electron beam is converted into the electric signals by a detector 7 to be amplified by an amplifier 8 for being put out as the positional signals. The detector 7 is consisted of a spectroscope for filtering waves of the X-rays with the specific wave length and a transducer for converting the strength of X-rays into electric signals.
JP16174380A 1980-11-17 1980-11-17 Positional matching Pending JPS5785232A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16174380A JPS5785232A (en) 1980-11-17 1980-11-17 Positional matching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16174380A JPS5785232A (en) 1980-11-17 1980-11-17 Positional matching

Publications (1)

Publication Number Publication Date
JPS5785232A true JPS5785232A (en) 1982-05-27

Family

ID=15741033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16174380A Pending JPS5785232A (en) 1980-11-17 1980-11-17 Positional matching

Country Status (1)

Country Link
JP (1) JPS5785232A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60183728A (en) * 1984-03-01 1985-09-19 Toshiba Corp Alignment method for electronic beam transferring

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5128385A (en) * 1974-09-02 1976-03-10 Nippon Keibi Hosho Kk JIDOSHOKA SOCHI
JPS5546552A (en) * 1978-09-28 1980-04-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Method of positioning electron beam

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5128385A (en) * 1974-09-02 1976-03-10 Nippon Keibi Hosho Kk JIDOSHOKA SOCHI
JPS5546552A (en) * 1978-09-28 1980-04-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Method of positioning electron beam

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60183728A (en) * 1984-03-01 1985-09-19 Toshiba Corp Alignment method for electronic beam transferring
JPH0578168B2 (en) * 1984-03-01 1993-10-28 Tokyo Shibaura Electric Co

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