JPS5720480A - Field effect type light detector - Google Patents
Field effect type light detectorInfo
- Publication number
- JPS5720480A JPS5720480A JP9507780A JP9507780A JPS5720480A JP S5720480 A JPS5720480 A JP S5720480A JP 9507780 A JP9507780 A JP 9507780A JP 9507780 A JP9507780 A JP 9507780A JP S5720480 A JPS5720480 A JP S5720480A
- Authority
- JP
- Japan
- Prior art keywords
- drain
- clearer
- crystal
- oxide film
- given
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005669 field effect Effects 0.000 title 1
- 239000013078 crystal Substances 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000003321 amplification Effects 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000003199 nucleic acid amplification method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/112—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
- H01L31/113—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor
- H01L31/1136—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor the device being a metal-insulator-semiconductor field-effect transistor
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE:To detect light with a high gain in a large wavelength range by providing an N<+> type source and drain on an Si substrate added to by impurities at a deep level while a clearer than opaque gate metal is provided on a channel region through a thermal oxide film. CONSTITUTION:An as impurity deep in an Si crystal is diffused for one hour at 1,000 deg.C to make a half-insulating Si substrate 1. An N<+> source and drain 2 and ohmic electrodes 3 and 4 are given by a widely known method and a clearer than opaque gate metal 7 is given on a thermal oxide film 6 to provide an electrode 5. With such an arrangement, the deep level diffusion in the crystal enebles the detection of far infrared rays while FET effect allows the amplification more than 100 times thereby dispencing with any pre-amplifier. Besides, the gate and drain voltages are operable below 5V, providing a higher utility.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9507780A JPS5720480A (en) | 1980-07-14 | 1980-07-14 | Field effect type light detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9507780A JPS5720480A (en) | 1980-07-14 | 1980-07-14 | Field effect type light detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5720480A true JPS5720480A (en) | 1982-02-02 |
JPS6246991B2 JPS6246991B2 (en) | 1987-10-06 |
Family
ID=14127895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9507780A Granted JPS5720480A (en) | 1980-07-14 | 1980-07-14 | Field effect type light detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5720480A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59147799U (en) * | 1983-03-25 | 1984-10-02 | 石川島建材工業株式会社 | concrete segment |
-
1980
- 1980-07-14 JP JP9507780A patent/JPS5720480A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59147799U (en) * | 1983-03-25 | 1984-10-02 | 石川島建材工業株式会社 | concrete segment |
Also Published As
Publication number | Publication date |
---|---|
JPS6246991B2 (en) | 1987-10-06 |
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