JPS57180184A - Manufacturing method for fet - Google Patents

Manufacturing method for fet

Info

Publication number
JPS57180184A
JPS57180184A JP56064050A JP6405081A JPS57180184A JP S57180184 A JPS57180184 A JP S57180184A JP 56064050 A JP56064050 A JP 56064050A JP 6405081 A JP6405081 A JP 6405081A JP S57180184 A JPS57180184 A JP S57180184A
Authority
JP
Japan
Prior art keywords
electrode
taper type
gate
exemplifiedly
formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56064050A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6248393B2 (enExample
Inventor
Toyokazu Onishi
Naoki Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56064050A priority Critical patent/JPS57180184A/ja
Publication of JPS57180184A publication Critical patent/JPS57180184A/ja
Publication of JPS6248393B2 publication Critical patent/JPS6248393B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10D64/0116—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP56064050A 1981-04-30 1981-04-30 Manufacturing method for fet Granted JPS57180184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56064050A JPS57180184A (en) 1981-04-30 1981-04-30 Manufacturing method for fet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56064050A JPS57180184A (en) 1981-04-30 1981-04-30 Manufacturing method for fet

Publications (2)

Publication Number Publication Date
JPS57180184A true JPS57180184A (en) 1982-11-06
JPS6248393B2 JPS6248393B2 (enExample) 1987-10-13

Family

ID=13246873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56064050A Granted JPS57180184A (en) 1981-04-30 1981-04-30 Manufacturing method for fet

Country Status (1)

Country Link
JP (1) JPS57180184A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60219765A (ja) * 1984-04-16 1985-11-02 Mitsubishi Electric Corp シヨツトキ−障壁電極
JPS61220376A (ja) * 1985-03-26 1986-09-30 Sumitomo Electric Ind Ltd ショットキゲート電界効果トランジスタの製造方法
JPS63160375A (ja) * 1986-12-11 1988-07-04 ジー・ティー・イー・ラボラトリーズ・インコーポレイテッド 電界効果トランジスタ及びその製造方法並びに半導体デバイスの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5194775A (enExample) * 1975-02-19 1976-08-19
JPS5197383A (enExample) * 1975-02-21 1976-08-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5194775A (enExample) * 1975-02-19 1976-08-19
JPS5197383A (enExample) * 1975-02-21 1976-08-26

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60219765A (ja) * 1984-04-16 1985-11-02 Mitsubishi Electric Corp シヨツトキ−障壁電極
JPS61220376A (ja) * 1985-03-26 1986-09-30 Sumitomo Electric Ind Ltd ショットキゲート電界効果トランジスタの製造方法
JPS63160375A (ja) * 1986-12-11 1988-07-04 ジー・ティー・イー・ラボラトリーズ・インコーポレイテッド 電界効果トランジスタ及びその製造方法並びに半導体デバイスの製造方法

Also Published As

Publication number Publication date
JPS6248393B2 (enExample) 1987-10-13

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