JPS57179929A - Manufacture for thin film magnetic head - Google Patents

Manufacture for thin film magnetic head

Info

Publication number
JPS57179929A
JPS57179929A JP6444081A JP6444081A JPS57179929A JP S57179929 A JPS57179929 A JP S57179929A JP 6444081 A JP6444081 A JP 6444081A JP 6444081 A JP6444081 A JP 6444081A JP S57179929 A JPS57179929 A JP S57179929A
Authority
JP
Japan
Prior art keywords
film
magnetic substance
layer
thickness
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6444081A
Other languages
Japanese (ja)
Other versions
JPS6117051B2 (en
Inventor
Junzo Toda
Akira Kakehi
Yoshio Koshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6444081A priority Critical patent/JPS57179929A/en
Publication of JPS57179929A publication Critical patent/JPS57179929A/en
Publication of JPS6117051B2 publication Critical patent/JPS6117051B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To obtain a magnetic substance film having magnetic concentration effect with low cost, by forming a recess in which a part of a lower magnetic substance layer corresponding to the front part is shallower than the rear part, etching a spacer layer on a base, coating a magnetic substance material on the entire surface, and polishing the spacer to the thickest part. CONSTITUTION:An SiO2 film 36 functioning as a spacer is adhered on a base 18, and an Al2O3 layer 38 is similarly adhered in the same vacuum tank. The thickness of the film 36 is made equal to the difference of the film thickness between the rear and front parts of a magnetic substance layer and the thickness of the film 38 is made equal to the film thickness of the front part. Further, a photoresist film is masked, the layer 38 in contact with a magnetic substance layer 12 is removed to a sharp edge by using phosphoric acid as an etching solution, as shown in a figure (b). Similarly, the film 36 in contact with a magnetic substance layer 12a is removed with the etching solution of fluoric acid as shown in a figure (e). Further, the magnetic substance material are a coated by the sum of each thickness on the entire surface as shown in figure (d). Then, the surface is polished until the surface of the layer 38 is exposed as shown in a figure (e).
JP6444081A 1981-04-28 1981-04-28 Manufacture for thin film magnetic head Granted JPS57179929A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6444081A JPS57179929A (en) 1981-04-28 1981-04-28 Manufacture for thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6444081A JPS57179929A (en) 1981-04-28 1981-04-28 Manufacture for thin film magnetic head

Publications (2)

Publication Number Publication Date
JPS57179929A true JPS57179929A (en) 1982-11-05
JPS6117051B2 JPS6117051B2 (en) 1986-05-06

Family

ID=13258336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6444081A Granted JPS57179929A (en) 1981-04-28 1981-04-28 Manufacture for thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS57179929A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5831801A (en) * 1997-01-21 1998-11-03 Yamaha Corporation Thin film magnetic head with special pole configuration

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5831801A (en) * 1997-01-21 1998-11-03 Yamaha Corporation Thin film magnetic head with special pole configuration
US6033580A (en) * 1997-01-21 2000-03-07 Yamaha Corporation Thin film magnetic head with special pole configuration

Also Published As

Publication number Publication date
JPS6117051B2 (en) 1986-05-06

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