JPS57179929A - Manufacture for thin film magnetic head - Google Patents
Manufacture for thin film magnetic headInfo
- Publication number
- JPS57179929A JPS57179929A JP6444081A JP6444081A JPS57179929A JP S57179929 A JPS57179929 A JP S57179929A JP 6444081 A JP6444081 A JP 6444081A JP 6444081 A JP6444081 A JP 6444081A JP S57179929 A JPS57179929 A JP S57179929A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic substance
- layer
- thickness
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
PURPOSE:To obtain a magnetic substance film having magnetic concentration effect with low cost, by forming a recess in which a part of a lower magnetic substance layer corresponding to the front part is shallower than the rear part, etching a spacer layer on a base, coating a magnetic substance material on the entire surface, and polishing the spacer to the thickest part. CONSTITUTION:An SiO2 film 36 functioning as a spacer is adhered on a base 18, and an Al2O3 layer 38 is similarly adhered in the same vacuum tank. The thickness of the film 36 is made equal to the difference of the film thickness between the rear and front parts of a magnetic substance layer and the thickness of the film 38 is made equal to the film thickness of the front part. Further, a photoresist film is masked, the layer 38 in contact with a magnetic substance layer 12 is removed to a sharp edge by using phosphoric acid as an etching solution, as shown in a figure (b). Similarly, the film 36 in contact with a magnetic substance layer 12a is removed with the etching solution of fluoric acid as shown in a figure (e). Further, the magnetic substance material are a coated by the sum of each thickness on the entire surface as shown in figure (d). Then, the surface is polished until the surface of the layer 38 is exposed as shown in a figure (e).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6444081A JPS57179929A (en) | 1981-04-28 | 1981-04-28 | Manufacture for thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6444081A JPS57179929A (en) | 1981-04-28 | 1981-04-28 | Manufacture for thin film magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57179929A true JPS57179929A (en) | 1982-11-05 |
JPS6117051B2 JPS6117051B2 (en) | 1986-05-06 |
Family
ID=13258336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6444081A Granted JPS57179929A (en) | 1981-04-28 | 1981-04-28 | Manufacture for thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57179929A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5831801A (en) * | 1997-01-21 | 1998-11-03 | Yamaha Corporation | Thin film magnetic head with special pole configuration |
-
1981
- 1981-04-28 JP JP6444081A patent/JPS57179929A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5831801A (en) * | 1997-01-21 | 1998-11-03 | Yamaha Corporation | Thin film magnetic head with special pole configuration |
US6033580A (en) * | 1997-01-21 | 2000-03-07 | Yamaha Corporation | Thin film magnetic head with special pole configuration |
Also Published As
Publication number | Publication date |
---|---|
JPS6117051B2 (en) | 1986-05-06 |
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