JPS5579035A - Forming method of grown film - Google Patents
Forming method of grown filmInfo
- Publication number
- JPS5579035A JPS5579035A JP15264678A JP15264678A JPS5579035A JP S5579035 A JPS5579035 A JP S5579035A JP 15264678 A JP15264678 A JP 15264678A JP 15264678 A JP15264678 A JP 15264678A JP S5579035 A JPS5579035 A JP S5579035A
- Authority
- JP
- Japan
- Prior art keywords
- grown film
- depression
- substrate
- pattern
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
PURPOSE: To provide a grown film having a high dimensional precision useful for fabricating cartridge coil, etc. by a method wherein a grown film is formed on the surface of a substrate having a required pattern depression, then polishing is performed from the surface side of the grown film to leave the grown film pattern in the depression, and the substrate is removed.
CONSTITUTION: A required pattern depression 2 is formed on the surface of a substrate 1 which is easy to be processed by acid etching or electric discharge machining, such as Fe-Ni base alloy. The depression is normally of the depth D less than 0.1mm. The substrate 1 surface is coated with a grown film 3 of required material such as TiC, TiN, SiC, etc. by use of vacuum deposition or sputtering method, etc. unit film thickness becomes sufficiently thick as compared with the depth D of the pattern depression. Then, plane polishing is performed from the surface side of the grown film 3 until the grown film reaches the thickness D" in the pattern depression 2. Removing the substrate 1 by acid etching provides a grown film 3' having the required pattern and thickness D".
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15264678A JPS5579035A (en) | 1978-12-12 | 1978-12-12 | Forming method of grown film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15264678A JPS5579035A (en) | 1978-12-12 | 1978-12-12 | Forming method of grown film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5579035A true JPS5579035A (en) | 1980-06-14 |
Family
ID=15544954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15264678A Pending JPS5579035A (en) | 1978-12-12 | 1978-12-12 | Forming method of grown film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5579035A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01288198A (en) * | 1988-05-16 | 1989-11-20 | Sony Corp | Speaker |
-
1978
- 1978-12-12 JP JP15264678A patent/JPS5579035A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01288198A (en) * | 1988-05-16 | 1989-11-20 | Sony Corp | Speaker |
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