JPS6425319A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS6425319A JPS6425319A JP18192187A JP18192187A JPS6425319A JP S6425319 A JPS6425319 A JP S6425319A JP 18192187 A JP18192187 A JP 18192187A JP 18192187 A JP18192187 A JP 18192187A JP S6425319 A JPS6425319 A JP S6425319A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- film
- stage
- lubricating
- depositing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lubricants (AREA)
- Paints Or Removers (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
PURPOSE:To improve the adhesiveness of a lubricating film to the surface of a protective film by executing a stage for cleaning and activating the surface of the protective film by dry etching, then shifting the stage into a stage for depositing the lubricating film thereon in the state of isolating the protective film having the cleaned surface from the atm., thereby depositing and forming the lubricating film on the surface of the protective film. CONSTITUTION:The stage for cleaning and activating the surface of the protective film 13 formed on a magnetic film 12 of a disk substrate 11 by a dry etching method such as plasma etching or sputter etching is executed and thereafter, the stage for depositing the lubricating film 14 on the cleaned surface of the protective film 14 in the clean environmental state where the protective film 13 is isolated form the atm. is started to deposit and form the lubricating film 14 on the surface of the protective film 13. The adhesiveness of the formed lubricating film 14 to the protective film 13 is thereby greatly improved and the surface lubricity of the magnetic recording medium is improved and stabilized. The breakdown, etc., of the medium surface by a head crash are thus prevented.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18192187A JPS6425319A (en) | 1987-07-20 | 1987-07-20 | Production of magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18192187A JPS6425319A (en) | 1987-07-20 | 1987-07-20 | Production of magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6425319A true JPS6425319A (en) | 1989-01-27 |
Family
ID=16109236
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18192187A Pending JPS6425319A (en) | 1987-07-20 | 1987-07-20 | Production of magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6425319A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02265018A (en) * | 1989-04-06 | 1990-10-29 | Matsushita Electric Ind Co Ltd | Method and apparatus for producing magnetic recording medium |
JPH0467429A (en) * | 1990-07-06 | 1992-03-03 | Kubota Corp | Formation of protective lubricating film of magnetic recording medium |
US20080075854A1 (en) * | 2006-09-27 | 2008-03-27 | Seagate Technology Llc | Ex-situ vapor phase lubrication for magnetic recording media |
JP2008269787A (en) * | 2008-07-28 | 2008-11-06 | Canon Anelva Corp | Magnetic recording disk manufacturing method and magnetic recording disk manufacturing apparatus |
US8147924B2 (en) | 2000-02-01 | 2012-04-03 | Canon Anelva Corporation | Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus |
-
1987
- 1987-07-20 JP JP18192187A patent/JPS6425319A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02265018A (en) * | 1989-04-06 | 1990-10-29 | Matsushita Electric Ind Co Ltd | Method and apparatus for producing magnetic recording medium |
JPH0467429A (en) * | 1990-07-06 | 1992-03-03 | Kubota Corp | Formation of protective lubricating film of magnetic recording medium |
US8147924B2 (en) | 2000-02-01 | 2012-04-03 | Canon Anelva Corporation | Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus |
US20080075854A1 (en) * | 2006-09-27 | 2008-03-27 | Seagate Technology Llc | Ex-situ vapor phase lubrication for magnetic recording media |
JP2008269787A (en) * | 2008-07-28 | 2008-11-06 | Canon Anelva Corp | Magnetic recording disk manufacturing method and magnetic recording disk manufacturing apparatus |
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