JPS6425319A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPS6425319A
JPS6425319A JP18192187A JP18192187A JPS6425319A JP S6425319 A JPS6425319 A JP S6425319A JP 18192187 A JP18192187 A JP 18192187A JP 18192187 A JP18192187 A JP 18192187A JP S6425319 A JPS6425319 A JP S6425319A
Authority
JP
Japan
Prior art keywords
protective film
film
stage
lubricating
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18192187A
Other languages
Japanese (ja)
Inventor
Ryosuke Furuishi
Junzo Toda
Akira Kakehi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18192187A priority Critical patent/JPS6425319A/en
Publication of JPS6425319A publication Critical patent/JPS6425319A/en
Pending legal-status Critical Current

Links

Landscapes

  • Lubricants (AREA)
  • Paints Or Removers (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To improve the adhesiveness of a lubricating film to the surface of a protective film by executing a stage for cleaning and activating the surface of the protective film by dry etching, then shifting the stage into a stage for depositing the lubricating film thereon in the state of isolating the protective film having the cleaned surface from the atm., thereby depositing and forming the lubricating film on the surface of the protective film. CONSTITUTION:The stage for cleaning and activating the surface of the protective film 13 formed on a magnetic film 12 of a disk substrate 11 by a dry etching method such as plasma etching or sputter etching is executed and thereafter, the stage for depositing the lubricating film 14 on the cleaned surface of the protective film 14 in the clean environmental state where the protective film 13 is isolated form the atm. is started to deposit and form the lubricating film 14 on the surface of the protective film 13. The adhesiveness of the formed lubricating film 14 to the protective film 13 is thereby greatly improved and the surface lubricity of the magnetic recording medium is improved and stabilized. The breakdown, etc., of the medium surface by a head crash are thus prevented.
JP18192187A 1987-07-20 1987-07-20 Production of magnetic recording medium Pending JPS6425319A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18192187A JPS6425319A (en) 1987-07-20 1987-07-20 Production of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18192187A JPS6425319A (en) 1987-07-20 1987-07-20 Production of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS6425319A true JPS6425319A (en) 1989-01-27

Family

ID=16109236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18192187A Pending JPS6425319A (en) 1987-07-20 1987-07-20 Production of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS6425319A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02265018A (en) * 1989-04-06 1990-10-29 Matsushita Electric Ind Co Ltd Method and apparatus for producing magnetic recording medium
JPH0467429A (en) * 1990-07-06 1992-03-03 Kubota Corp Formation of protective lubricating film of magnetic recording medium
US20080075854A1 (en) * 2006-09-27 2008-03-27 Seagate Technology Llc Ex-situ vapor phase lubrication for magnetic recording media
JP2008269787A (en) * 2008-07-28 2008-11-06 Canon Anelva Corp Magnetic recording disk manufacturing method and magnetic recording disk manufacturing apparatus
US8147924B2 (en) 2000-02-01 2012-04-03 Canon Anelva Corporation Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02265018A (en) * 1989-04-06 1990-10-29 Matsushita Electric Ind Co Ltd Method and apparatus for producing magnetic recording medium
JPH0467429A (en) * 1990-07-06 1992-03-03 Kubota Corp Formation of protective lubricating film of magnetic recording medium
US8147924B2 (en) 2000-02-01 2012-04-03 Canon Anelva Corporation Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
US20080075854A1 (en) * 2006-09-27 2008-03-27 Seagate Technology Llc Ex-situ vapor phase lubrication for magnetic recording media
JP2008269787A (en) * 2008-07-28 2008-11-06 Canon Anelva Corp Magnetic recording disk manufacturing method and magnetic recording disk manufacturing apparatus

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