JPS57169261A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57169261A
JPS57169261A JP5383881A JP5383881A JPS57169261A JP S57169261 A JPS57169261 A JP S57169261A JP 5383881 A JP5383881 A JP 5383881A JP 5383881 A JP5383881 A JP 5383881A JP S57169261 A JPS57169261 A JP S57169261A
Authority
JP
Japan
Prior art keywords
layers
wiring
opening
shaped
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5383881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6362103B2 (enrdf_load_stackoverflow
Inventor
Yasuhisa Sato
Shuji Tabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5383881A priority Critical patent/JPS57169261A/ja
Publication of JPS57169261A publication Critical patent/JPS57169261A/ja
Publication of JPS6362103B2 publication Critical patent/JPS6362103B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP5383881A 1981-04-10 1981-04-10 Manufacture of semiconductor device Granted JPS57169261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5383881A JPS57169261A (en) 1981-04-10 1981-04-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5383881A JPS57169261A (en) 1981-04-10 1981-04-10 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57169261A true JPS57169261A (en) 1982-10-18
JPS6362103B2 JPS6362103B2 (enrdf_load_stackoverflow) 1988-12-01

Family

ID=12953919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5383881A Granted JPS57169261A (en) 1981-04-10 1981-04-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57169261A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02281736A (ja) * 1989-04-24 1990-11-19 Sony Corp 多層配線形成方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS507430A (enrdf_load_stackoverflow) * 1973-05-18 1975-01-25
JPS5187981A (enrdf_load_stackoverflow) * 1975-01-31 1976-07-31 Hitachi Ltd
JPS52106675A (en) * 1976-03-05 1977-09-07 Toshiba Corp Manufacturing method of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS507430A (enrdf_load_stackoverflow) * 1973-05-18 1975-01-25
JPS5187981A (enrdf_load_stackoverflow) * 1975-01-31 1976-07-31 Hitachi Ltd
JPS52106675A (en) * 1976-03-05 1977-09-07 Toshiba Corp Manufacturing method of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02281736A (ja) * 1989-04-24 1990-11-19 Sony Corp 多層配線形成方法

Also Published As

Publication number Publication date
JPS6362103B2 (enrdf_load_stackoverflow) 1988-12-01

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