JPS6362103B2 - - Google Patents

Info

Publication number
JPS6362103B2
JPS6362103B2 JP56053838A JP5383881A JPS6362103B2 JP S6362103 B2 JPS6362103 B2 JP S6362103B2 JP 56053838 A JP56053838 A JP 56053838A JP 5383881 A JP5383881 A JP 5383881A JP S6362103 B2 JPS6362103 B2 JP S6362103B2
Authority
JP
Japan
Prior art keywords
layer
aluminum
electrode window
insulating film
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56053838A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57169261A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5383881A priority Critical patent/JPS57169261A/ja
Publication of JPS57169261A publication Critical patent/JPS57169261A/ja
Publication of JPS6362103B2 publication Critical patent/JPS6362103B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP5383881A 1981-04-10 1981-04-10 Manufacture of semiconductor device Granted JPS57169261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5383881A JPS57169261A (en) 1981-04-10 1981-04-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5383881A JPS57169261A (en) 1981-04-10 1981-04-10 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57169261A JPS57169261A (en) 1982-10-18
JPS6362103B2 true JPS6362103B2 (enrdf_load_stackoverflow) 1988-12-01

Family

ID=12953919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5383881A Granted JPS57169261A (en) 1981-04-10 1981-04-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57169261A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02281736A (ja) * 1989-04-24 1990-11-19 Sony Corp 多層配線形成方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS507430A (enrdf_load_stackoverflow) * 1973-05-18 1975-01-25
JPS5187981A (enrdf_load_stackoverflow) * 1975-01-31 1976-07-31 Hitachi Ltd
JPS52106675A (en) * 1976-03-05 1977-09-07 Toshiba Corp Manufacturing method of semiconductor device

Also Published As

Publication number Publication date
JPS57169261A (en) 1982-10-18

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