JPS57169237A - Jig for heating silicon wafer - Google Patents
Jig for heating silicon waferInfo
- Publication number
- JPS57169237A JPS57169237A JP5403081A JP5403081A JPS57169237A JP S57169237 A JPS57169237 A JP S57169237A JP 5403081 A JP5403081 A JP 5403081A JP 5403081 A JP5403081 A JP 5403081A JP S57169237 A JPS57169237 A JP S57169237A
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- jig
- silicon carbide
- jigs
- specific gravity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
- H01L21/67316—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5403081A JPS57169237A (en) | 1981-04-10 | 1981-04-10 | Jig for heating silicon wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5403081A JPS57169237A (en) | 1981-04-10 | 1981-04-10 | Jig for heating silicon wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57169237A true JPS57169237A (en) | 1982-10-18 |
Family
ID=12959181
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5403081A Pending JPS57169237A (en) | 1981-04-10 | 1981-04-10 | Jig for heating silicon wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57169237A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60213022A (ja) * | 1984-04-09 | 1985-10-25 | Tekunisuko:Kk | 縦型支持具 |
-
1981
- 1981-04-10 JP JP5403081A patent/JPS57169237A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60213022A (ja) * | 1984-04-09 | 1985-10-25 | Tekunisuko:Kk | 縦型支持具 |
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