JPS5413260A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5413260A
JPS5413260A JP7858177A JP7858177A JPS5413260A JP S5413260 A JPS5413260 A JP S5413260A JP 7858177 A JP7858177 A JP 7858177A JP 7858177 A JP7858177 A JP 7858177A JP S5413260 A JPS5413260 A JP S5413260A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
thin
semiconductor layer
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7858177A
Other languages
Japanese (ja)
Inventor
Shigeki Iwauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP7858177A priority Critical patent/JPS5413260A/en
Publication of JPS5413260A publication Critical patent/JPS5413260A/en
Pending legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To obtain the high resistance semiconductor layer having uniform impurity concentration and thin, by heating the Si substrate at a high temperature in a super high vacuum chamber and by obtaining required thickness through.
COPYRIGHT: (C)1979,JPO&Japio
JP7858177A 1977-07-01 1977-07-01 Manufacture for semiconductor device Pending JPS5413260A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7858177A JPS5413260A (en) 1977-07-01 1977-07-01 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7858177A JPS5413260A (en) 1977-07-01 1977-07-01 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5413260A true JPS5413260A (en) 1979-01-31

Family

ID=13665865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7858177A Pending JPS5413260A (en) 1977-07-01 1977-07-01 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5413260A (en)

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