JPS5410667A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5410667A
JPS5410667A JP7555877A JP7555877A JPS5410667A JP S5410667 A JPS5410667 A JP S5410667A JP 7555877 A JP7555877 A JP 7555877A JP 7555877 A JP7555877 A JP 7555877A JP S5410667 A JPS5410667 A JP S5410667A
Authority
JP
Japan
Prior art keywords
specific resistance
high specific
resistance layers
semiconductor device
subjecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7555877A
Other languages
Japanese (ja)
Inventor
Saburo Oikawa
Junichi Koizumi
Kenji Miyata
Yoshio Terasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7555877A priority Critical patent/JPS5410667A/en
Publication of JPS5410667A publication Critical patent/JPS5410667A/en
Pending legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To reduce the high specific resistance layers of channel parts and obtain semiconductor elements of good characteristics by subjecting the substrate to heat treatment at a temperature higher than the growth temperature after forming epitaxial growth layer in order to remove high specific resistance layers.
COPYRIGHT: (C)1979,JPO&Japio
JP7555877A 1977-06-27 1977-06-27 Semiconductor device Pending JPS5410667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7555877A JPS5410667A (en) 1977-06-27 1977-06-27 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7555877A JPS5410667A (en) 1977-06-27 1977-06-27 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5410667A true JPS5410667A (en) 1979-01-26

Family

ID=13579621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7555877A Pending JPS5410667A (en) 1977-06-27 1977-06-27 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5410667A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4860574A (en) * 1971-11-22 1973-08-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4860574A (en) * 1971-11-22 1973-08-24

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