JPS57167659A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57167659A
JPS57167659A JP56047099A JP4709981A JPS57167659A JP S57167659 A JPS57167659 A JP S57167659A JP 56047099 A JP56047099 A JP 56047099A JP 4709981 A JP4709981 A JP 4709981A JP S57167659 A JPS57167659 A JP S57167659A
Authority
JP
Japan
Prior art keywords
region
layer
wiring
insulating film
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56047099A
Other languages
English (en)
Inventor
Shuzo Oshio
Yasutaka Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56047099A priority Critical patent/JPS57167659A/ja
Publication of JPS57167659A publication Critical patent/JPS57167659A/ja
Pending legal-status Critical Current

Links

Classifications

    • H10W20/069—
    • H10W20/063—
    • H10W20/0633—
    • H10W20/0693—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP56047099A 1981-03-30 1981-03-30 Manufacture of semiconductor device Pending JPS57167659A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56047099A JPS57167659A (en) 1981-03-30 1981-03-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56047099A JPS57167659A (en) 1981-03-30 1981-03-30 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS57167659A true JPS57167659A (en) 1982-10-15

Family

ID=12765727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56047099A Pending JPS57167659A (en) 1981-03-30 1981-03-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57167659A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130144A (ja) * 1983-12-15 1985-07-11 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 相互接続用スタツド構造体形成方法
JPS60198846A (ja) * 1984-03-23 1985-10-08 Nec Corp 半導体装置
JPS63274159A (ja) * 1987-04-29 1988-11-11 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 半導体装置およびその製造方法
JPH09153544A (ja) * 1995-11-29 1997-06-10 Nec Corp 半導体装置及びその製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4835778A (ja) * 1971-09-09 1973-05-26
JPS4894866A (ja) * 1972-03-15 1973-12-06
JPS5158071A (ja) * 1974-11-18 1976-05-21 Nichiden Varian Kk Supatsutaetsuchinguho
JPS5382268A (en) * 1976-12-28 1978-07-20 Toshiba Corp Production of mask

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4835778A (ja) * 1971-09-09 1973-05-26
JPS4894866A (ja) * 1972-03-15 1973-12-06
JPS5158071A (ja) * 1974-11-18 1976-05-21 Nichiden Varian Kk Supatsutaetsuchinguho
JPS5382268A (en) * 1976-12-28 1978-07-20 Toshiba Corp Production of mask

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130144A (ja) * 1983-12-15 1985-07-11 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 相互接続用スタツド構造体形成方法
JPS60198846A (ja) * 1984-03-23 1985-10-08 Nec Corp 半導体装置
JPS63274159A (ja) * 1987-04-29 1988-11-11 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 半導体装置およびその製造方法
JPH09153544A (ja) * 1995-11-29 1997-06-10 Nec Corp 半導体装置及びその製造方法

Similar Documents

Publication Publication Date Title
JPS57204133A (en) Manufacture of semiconductor integrated circuit
JPS57167659A (en) Manufacture of semiconductor device
JPS5629326A (en) Manufacture of semiconductor device
JPS5688358A (en) Manufacture of semiconductor device
JPS5732653A (en) Manufacture of semiconductor device
JPS5317286A (en) Production of semiconductor device
JPS5637674A (en) Manufacture of semiconductor device
JPS57169259A (en) Manufacture of semiconductor device
JPS5743431A (en) Manufacture of semiconductor device
JPS544575A (en) Production of semiconductor devices
JPS57153435A (en) Manufacture of semiconductor device
JPS6444068A (en) Manufacture of semiconductor device
JPS5791537A (en) Manufacture of semiconductor device
JPS5776864A (en) Manufacture of semiconductor device
JPS5753941A (en) Semiconductor device
JPS5759358A (en) Manufacture of semiconductor device
JPS5633826A (en) Manufacture of target
JPS56120154A (en) Coil and its manufacture
JPS56130947A (en) Manufacture of semiconductor device
JPS5527637A (en) Photo-resist-pattern forming method
JPS5743418A (en) Manufacture of semiconductor device
JPS5527662A (en) Method of manufacturing semiconductor device
JPS5593223A (en) Manufacture of mask for semiconductor device
JPS57178323A (en) Manufacture of semiconductor element
JPS546775A (en) Semiconductor device featuring stepped electrode structure