JPS57164529A - Dry etching method - Google Patents

Dry etching method

Info

Publication number
JPS57164529A
JPS57164529A JP56049266A JP4926681A JPS57164529A JP S57164529 A JPS57164529 A JP S57164529A JP 56049266 A JP56049266 A JP 56049266A JP 4926681 A JP4926681 A JP 4926681A JP S57164529 A JPS57164529 A JP S57164529A
Authority
JP
Japan
Prior art keywords
etching
flow amount
parallel flat
gas
gas flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56049266A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0160939B2 (https=
Inventor
Jun Kanamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP56049266A priority Critical patent/JPS57164529A/ja
Publication of JPS57164529A publication Critical patent/JPS57164529A/ja
Publication of JPH0160939B2 publication Critical patent/JPH0160939B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Drying Of Semiconductors (AREA)
JP56049266A 1981-04-03 1981-04-03 Dry etching method Granted JPS57164529A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56049266A JPS57164529A (en) 1981-04-03 1981-04-03 Dry etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56049266A JPS57164529A (en) 1981-04-03 1981-04-03 Dry etching method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1638289A Division JPH01230238A (ja) 1989-01-27 1989-01-27 ドライエッチング方法

Publications (2)

Publication Number Publication Date
JPS57164529A true JPS57164529A (en) 1982-10-09
JPH0160939B2 JPH0160939B2 (https=) 1989-12-26

Family

ID=12826023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56049266A Granted JPS57164529A (en) 1981-04-03 1981-04-03 Dry etching method

Country Status (1)

Country Link
JP (1) JPS57164529A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61256724A (ja) * 1985-05-06 1986-11-14 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション プラズマ・エツチ開孔のプロフイルを制御する方法
US7074724B2 (en) * 2000-04-27 2006-07-11 Micron Technology, Inc. Etchant and method of use

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5137108A (en) * 1989-12-28 1992-08-11 Aar Corporation Vehicle engine mounting system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480685A (en) * 1977-12-09 1979-06-27 Chiyou Uru Esu Ai Gijiyutsu Ke Dry etching method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480685A (en) * 1977-12-09 1979-06-27 Chiyou Uru Esu Ai Gijiyutsu Ke Dry etching method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61256724A (ja) * 1985-05-06 1986-11-14 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション プラズマ・エツチ開孔のプロフイルを制御する方法
US7074724B2 (en) * 2000-04-27 2006-07-11 Micron Technology, Inc. Etchant and method of use

Also Published As

Publication number Publication date
JPH0160939B2 (https=) 1989-12-26

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