JPS57162456A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57162456A
JPS57162456A JP56047447A JP4744781A JPS57162456A JP S57162456 A JPS57162456 A JP S57162456A JP 56047447 A JP56047447 A JP 56047447A JP 4744781 A JP4744781 A JP 4744781A JP S57162456 A JPS57162456 A JP S57162456A
Authority
JP
Japan
Prior art keywords
layers
films
element forming
forming regions
sio2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56047447A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328070B2 (enrdf_load_stackoverflow
Inventor
Yoshito Ichinose
Takeshi Fukuda
Masayuki Kikuchi
Toshiji Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56047447A priority Critical patent/JPS57162456A/ja
Publication of JPS57162456A publication Critical patent/JPS57162456A/ja
Publication of JPH0328070B2 publication Critical patent/JPH0328070B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP56047447A 1981-03-31 1981-03-31 Manufacture of semiconductor device Granted JPS57162456A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56047447A JPS57162456A (en) 1981-03-31 1981-03-31 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56047447A JPS57162456A (en) 1981-03-31 1981-03-31 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57162456A true JPS57162456A (en) 1982-10-06
JPH0328070B2 JPH0328070B2 (enrdf_load_stackoverflow) 1991-04-17

Family

ID=12775393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56047447A Granted JPS57162456A (en) 1981-03-31 1981-03-31 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57162456A (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057590A (enrdf_load_stackoverflow) * 1973-09-20 1975-05-20
JPS51134082A (en) * 1975-05-15 1976-11-20 Iwatsu Electric Co Ltd Method to manufacture the semiconductor unit
JPS5295985A (en) * 1976-02-09 1977-08-12 Hitachi Ltd Manufacture of semiconductor unit
JPS55154746A (en) * 1979-05-22 1980-12-02 Semiconductor Res Found Manufacture of semiconductor integrated circuit device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057590A (enrdf_load_stackoverflow) * 1973-09-20 1975-05-20
JPS51134082A (en) * 1975-05-15 1976-11-20 Iwatsu Electric Co Ltd Method to manufacture the semiconductor unit
JPS5295985A (en) * 1976-02-09 1977-08-12 Hitachi Ltd Manufacture of semiconductor unit
JPS55154746A (en) * 1979-05-22 1980-12-02 Semiconductor Res Found Manufacture of semiconductor integrated circuit device

Also Published As

Publication number Publication date
JPH0328070B2 (enrdf_load_stackoverflow) 1991-04-17

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