JPS551108A - Mis integrated circuit - Google Patents
Mis integrated circuitInfo
- Publication number
- JPS551108A JPS551108A JP7292978A JP7292978A JPS551108A JP S551108 A JPS551108 A JP S551108A JP 7292978 A JP7292978 A JP 7292978A JP 7292978 A JP7292978 A JP 7292978A JP S551108 A JPS551108 A JP S551108A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- substrate
- produced
- semiconductor layer
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Element Separation (AREA)
Abstract
PURPOSE: To prevent the deterioration in the boundary state of an oxide film for field, by producing the oxide film at such a thickness that the film does not reach a semiconductor substrate and causing an impurity to creep up to a semiconductor layer located between the substrate and the oxide film so that a channel cut region is produced.
CONSTITUTION: The oxide film 3 for field is produced at such a thickness by thermal oxidation on the surface of the semiconductor layer 2 epitaxially grown on the semiconductor substrate 1 that the oxide film 3 does not reach the substrate 1. The impurity is caused to creep up to the semiconductor layer located between the substrate 1 and the oxide film 3 so that the channel cut region is produced. The deterioration in the boundary state of the oxide film for field can thus be prevented.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7292978A JPS551108A (en) | 1978-06-16 | 1978-06-16 | Mis integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7292978A JPS551108A (en) | 1978-06-16 | 1978-06-16 | Mis integrated circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS551108A true JPS551108A (en) | 1980-01-07 |
Family
ID=13503531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7292978A Pending JPS551108A (en) | 1978-06-16 | 1978-06-16 | Mis integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS551108A (en) |
-
1978
- 1978-06-16 JP JP7292978A patent/JPS551108A/en active Pending
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