JPS57160164A - Nonvolatile semiconductor memory - Google Patents

Nonvolatile semiconductor memory

Info

Publication number
JPS57160164A
JPS57160164A JP56045280A JP4528081A JPS57160164A JP S57160164 A JPS57160164 A JP S57160164A JP 56045280 A JP56045280 A JP 56045280A JP 4528081 A JP4528081 A JP 4528081A JP S57160164 A JPS57160164 A JP S57160164A
Authority
JP
Japan
Prior art keywords
region
insulating film
semiconductor
semiconductor substrate
semiconductor memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56045280A
Other languages
Japanese (ja)
Inventor
Yoshio Hattori
Masaaki Kamiya
Yoshikazu Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP56045280A priority Critical patent/JPS57160164A/en
Publication of JPS57160164A publication Critical patent/JPS57160164A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/788Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881Programmable transistors with only two possible levels of programmation

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)

Abstract

PURPOSE:To decrease a write voltage and to permit high integration with a small sized nonvolatile semiconductor memory as well by providing a different conductivity type injector region at the surface of a semiconductor region around an injection insulating film. CONSTITUTION:A source region 22 and a drain region 23 are provided on the surface of a semiconductor substrate 21. Furthermore, an injector region 24 is provided on the surface of the semiconductor substrate 21. The first gate insulating film is provided on the surface of the region 23 and the second gate insulating film is provided on the surface of the semiconductor substrate between the regions 22 and 23. And, a stray gate 26 convered with an insulating film 25 and insulated from the outside is provided on an injection insulating film 29 provided on the surface of the semiconductor by adjoining the region 23.
JP56045280A 1981-03-27 1981-03-27 Nonvolatile semiconductor memory Pending JPS57160164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56045280A JPS57160164A (en) 1981-03-27 1981-03-27 Nonvolatile semiconductor memory

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56045280A JPS57160164A (en) 1981-03-27 1981-03-27 Nonvolatile semiconductor memory

Publications (1)

Publication Number Publication Date
JPS57160164A true JPS57160164A (en) 1982-10-02

Family

ID=12714889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56045280A Pending JPS57160164A (en) 1981-03-27 1981-03-27 Nonvolatile semiconductor memory

Country Status (1)

Country Link
JP (1) JPS57160164A (en)

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