JPS57157116A - Photoelectric type encoder - Google Patents

Photoelectric type encoder

Info

Publication number
JPS57157116A
JPS57157116A JP4263881A JP4263881A JPS57157116A JP S57157116 A JPS57157116 A JP S57157116A JP 4263881 A JP4263881 A JP 4263881A JP 4263881 A JP4263881 A JP 4263881A JP S57157116 A JPS57157116 A JP S57157116A
Authority
JP
Japan
Prior art keywords
optical grating
photo
type semiconductor
light
electrode layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4263881A
Other languages
Japanese (ja)
Inventor
Yoshihiko Kabaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP4263881A priority Critical patent/JPS57157116A/en
Priority to GB8207294A priority patent/GB2094974B/en
Priority to DE3209043A priority patent/DE3209043C2/en
Publication of JPS57157116A publication Critical patent/JPS57157116A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:To reduce attenuation of the amount of light between a light emitting device and a light receiving device, by providing photo FETs having thin belt shaped photoelectric transducing surfaces on a second optical grating which faces a first optical grating. CONSTITUTION:The light emitted from the light emitting device passes the first optical grating 10 and reaches the second optical grating 12. The second optical grating 12 moves in correspondence with the measured value. An N type semiconductor substrate 28 is stuck to a substrate 26 of the second optical grating 12, and a photo FET group is formed. An oxide film 32 having thin belt shaped grooves 30 at a specified interval is formed on the N type semiconductor substrate 28. P type semiconductor layers 34 are diffused and formed beneath the grooves 30. Therefore, P channel enhancement type photo FETs are arranged in the longitudinal direction of the second optical grating 12 at a specified interval. The voltage obtained by each photo FET is taken out through a drain electrode layer 40 and a source electrode layer 42.
JP4263881A 1981-03-12 1981-03-24 Photoelectric type encoder Pending JPS57157116A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP4263881A JPS57157116A (en) 1981-03-24 1981-03-24 Photoelectric type encoder
GB8207294A GB2094974B (en) 1981-03-12 1982-03-12 Photoelectric encoder device
DE3209043A DE3209043C2 (en) 1981-03-12 1982-03-12 Photoelectric motion measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4263881A JPS57157116A (en) 1981-03-24 1981-03-24 Photoelectric type encoder

Publications (1)

Publication Number Publication Date
JPS57157116A true JPS57157116A (en) 1982-09-28

Family

ID=12641549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4263881A Pending JPS57157116A (en) 1981-03-12 1981-03-24 Photoelectric type encoder

Country Status (1)

Country Link
JP (1) JPS57157116A (en)

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