GB2094974B - Photoelectric encoder device - Google Patents

Photoelectric encoder device

Info

Publication number
GB2094974B
GB2094974B GB8207294A GB8207294A GB2094974B GB 2094974 B GB2094974 B GB 2094974B GB 8207294 A GB8207294 A GB 8207294A GB 8207294 A GB8207294 A GB 8207294A GB 2094974 B GB2094974 B GB 2094974B
Authority
GB
United Kingdom
Prior art keywords
photoelectric encoder
encoder device
photoelectric
encoder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8207294A
Other versions
GB2094974A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Manufacturing Co Ltd
Original Assignee
Mitutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3589681A external-priority patent/JPS57149913A/en
Priority claimed from JP4263781A external-priority patent/JPS57157115A/en
Priority claimed from JP4263981A external-priority patent/JPS57157117A/en
Priority claimed from JP4263881A external-priority patent/JPS57157116A/en
Application filed by Mitutoyo Manufacturing Co Ltd filed Critical Mitutoyo Manufacturing Co Ltd
Publication of GB2094974A publication Critical patent/GB2094974A/en
Application granted granted Critical
Publication of GB2094974B publication Critical patent/GB2094974B/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42Devices characterised by the use of electric or magnetic means
    • G01P3/44Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/486Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by photo-electric detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/1446Devices controlled by radiation in a repetitive configuration
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03MCODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12Analogue/digital converters
    • H03M1/22Analogue/digital converters pattern-reading type
    • H03M1/24Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip
    • H03M1/28Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding
    • H03M1/30Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding incremental

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Transform (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
GB8207294A 1981-03-12 1982-03-12 Photoelectric encoder device Expired GB2094974B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP3589681A JPS57149913A (en) 1981-03-12 1981-03-12 Photoelectric encoder
JP4263781A JPS57157115A (en) 1981-03-24 1981-03-24 Photoelectric type encoder
JP4263981A JPS57157117A (en) 1981-03-24 1981-03-24 Photoelectric type encoder
JP4263881A JPS57157116A (en) 1981-03-24 1981-03-24 Photoelectric type encoder

Publications (2)

Publication Number Publication Date
GB2094974A GB2094974A (en) 1982-09-22
GB2094974B true GB2094974B (en) 1984-11-14

Family

ID=27460172

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8207294A Expired GB2094974B (en) 1981-03-12 1982-03-12 Photoelectric encoder device

Country Status (2)

Country Link
DE (1) DE3209043C2 (en)
GB (1) GB2094974B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3244339A1 (en) * 1982-11-30 1984-05-30 Siemens AG, 1000 Berlin und 8000 München Device for interrogating a line grating irradiated by a light transmitter
DE3790038T1 (en) * 1986-03-14 1988-03-31
DE4212281A1 (en) * 1991-07-11 1993-10-14 Heidenhain Gmbh Dr Johannes Position-measuring appts. using spatially modulated gratings - produces different aperiodic waveforms from various functional dependences of local grating period on direction of modulation
DE4210538A1 (en) * 1992-03-31 1994-01-13 Zentrum Fuer Intelligente Sens Monolithic integrated sensor for photoelectric incremental distance and angle measurement - has photoelectric sensor and signal processing components on silicon@ chip with regions around bonding islands recessed to depth of 50 to 100 microns
DE4323712C2 (en) * 1993-07-15 1997-12-11 Heidenhain Gmbh Dr Johannes Photoelectric length or angle measuring device
DE4323624C2 (en) * 1993-07-15 1997-09-11 Heidenhain Gmbh Dr Johannes Photoelectric length or angle measuring device
US5530543A (en) * 1994-07-06 1996-06-25 Optra, Inc. Detector array for use in interferometric metrology systems
GB9425907D0 (en) * 1994-12-22 1995-02-22 Renishaw Plc Opto-electronic scale reading apparatus
GB9522491D0 (en) * 1995-11-02 1996-01-03 Renishaw Plc Opto-electronic rotary encoder
US5936294A (en) * 1996-05-28 1999-08-10 Motorola, Inc. Optical semiconductor component and method of fabrication
JPH11183199A (en) * 1997-12-25 1999-07-09 Merutekku:Kk Scale for photosensor
JP2002009328A (en) * 2000-06-21 2002-01-11 Mitsutoyo Corp Photosensitive element array and its manufacturing method
DE102018109615A1 (en) * 2018-04-20 2019-10-24 Carmar Accuracy Co., Ltd. Sensor chip of a reading head of an optical ruler

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1231029A (en) * 1968-12-13 1971-05-05
NL7403468A (en) * 1974-03-15 1975-09-17 Philips Nv DEVICE FOR DETERMINING THE MOVEMENT OF A PART OF A TOOL.

Also Published As

Publication number Publication date
DE3209043C2 (en) 1986-09-25
GB2094974A (en) 1982-09-22
DE3209043A1 (en) 1982-11-18

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19980312