JPS57147514A - Preparation of ultra-thin film - Google Patents

Preparation of ultra-thin film

Info

Publication number
JPS57147514A
JPS57147514A JP3221881A JP3221881A JPS57147514A JP S57147514 A JPS57147514 A JP S57147514A JP 3221881 A JP3221881 A JP 3221881A JP 3221881 A JP3221881 A JP 3221881A JP S57147514 A JPS57147514 A JP S57147514A
Authority
JP
Japan
Prior art keywords
polymerization
ultra
thin film
substituting
hydrogen atoms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3221881A
Other languages
Japanese (ja)
Inventor
Kakuji Katsuura
Kunihiro Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Priority to JP3221881A priority Critical patent/JPS57147514A/en
Publication of JPS57147514A publication Critical patent/JPS57147514A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Surface Treatment Of Glass (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)

Abstract

PURPOSE:To prepare an ultra-thin film soluble in organic solvents, by the plasma polymerization of a compound obtained by substituting a part of the hydrogen atoms of a lower saturated hydrocarbon with Cl and F, on the surface of a substrate. CONSTITUTION:A monomer gas composed of a compound obtained by substituting a part of the hydrogen atoms of a lower saturated hydrocarbon (e.g. methane) with chlorine atom and fluorine atom (e.g. CHCl2F) is subjected to the plsama polymerization on the surface of a substrate material (e.g. made of polyethylene, etc.). The polymerization can be carried out at room temperature. The monomer gas may contain a polymerizable vinyl monomer preferably in an amount of <=40mol%. USE:Resist for electron rays.
JP3221881A 1981-03-06 1981-03-06 Preparation of ultra-thin film Pending JPS57147514A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3221881A JPS57147514A (en) 1981-03-06 1981-03-06 Preparation of ultra-thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3221881A JPS57147514A (en) 1981-03-06 1981-03-06 Preparation of ultra-thin film

Publications (1)

Publication Number Publication Date
JPS57147514A true JPS57147514A (en) 1982-09-11

Family

ID=12352786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3221881A Pending JPS57147514A (en) 1981-03-06 1981-03-06 Preparation of ultra-thin film

Country Status (1)

Country Link
JP (1) JPS57147514A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999032235A1 (en) * 1997-12-18 1999-07-01 Btg International Limited Applying fluoropolymer film to a body

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999032235A1 (en) * 1997-12-18 1999-07-01 Btg International Limited Applying fluoropolymer film to a body
US6358569B1 (en) 1997-12-18 2002-03-19 Mupor Limited Applying a film to a body

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