JPS5676414A - Discharge-polymerized membrane and production thereof - Google Patents

Discharge-polymerized membrane and production thereof

Info

Publication number
JPS5676414A
JPS5676414A JP15206979A JP15206979A JPS5676414A JP S5676414 A JPS5676414 A JP S5676414A JP 15206979 A JP15206979 A JP 15206979A JP 15206979 A JP15206979 A JP 15206979A JP S5676414 A JPS5676414 A JP S5676414A
Authority
JP
Japan
Prior art keywords
discharge
substrate
polymerized membrane
polymerized
dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15206979A
Other languages
Japanese (ja)
Other versions
JPS6363564B2 (en
Inventor
Akira Morinaka
Yoshihiro Asano
Hiroshi Murase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP15206979A priority Critical patent/JPS5676414A/en
Publication of JPS5676414A publication Critical patent/JPS5676414A/en
Publication of JPS6363564B2 publication Critical patent/JPS6363564B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polymerisation Methods In General (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

PURPOSE: To produce a discharge-polymerized membrane which can be used as a thin resist film having excellent dry-etching resistance, high sensitivity and good uniformity, by discharge-polymerizing, by gas-discharge, a specified fluorine-containing compound onto a substrate under specified conditions.
CONSTITUTION: A substrate 4 is fixed on a substrate holder 5 within a reaction vessel 1; the container is then evacuated; a fluorine-containing compound of the formula, wherein R is a fluoroalkyl, is introduced from a gas inlet 2 so as to provide a pressure of 10W10-3torr; a voltage is applied between high-frequency electrodes 6 and 6' by a high-frequency source 7; the gaseous monomer is discharged and polymerized into a discharge-polymerized membrane on the substrate 4.
EFFECT: The energy ray-sensitivity of this discharge-polymerized membrane is higher several times than that of a conventional discharge-polymerized membrane of methyl methacrylate, and can be dry-developed. Accordingly, dry processing is possible in steps from development to substrate working.
COPYRIGHT: (C)1981,JPO&Japio
JP15206979A 1979-11-26 1979-11-26 Discharge-polymerized membrane and production thereof Granted JPS5676414A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15206979A JPS5676414A (en) 1979-11-26 1979-11-26 Discharge-polymerized membrane and production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15206979A JPS5676414A (en) 1979-11-26 1979-11-26 Discharge-polymerized membrane and production thereof

Publications (2)

Publication Number Publication Date
JPS5676414A true JPS5676414A (en) 1981-06-24
JPS6363564B2 JPS6363564B2 (en) 1988-12-07

Family

ID=15532367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15206979A Granted JPS5676414A (en) 1979-11-26 1979-11-26 Discharge-polymerized membrane and production thereof

Country Status (1)

Country Link
JP (1) JPS5676414A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57119906A (en) * 1981-01-19 1982-07-26 Daikin Ind Ltd Formation of smooth film on substrate
JPS60188410A (en) * 1984-03-09 1985-09-25 Daikin Ind Ltd Coating material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57119906A (en) * 1981-01-19 1982-07-26 Daikin Ind Ltd Formation of smooth film on substrate
JPH0211606B2 (en) * 1981-01-19 1990-03-15 Daikin Ind Ltd
JPS60188410A (en) * 1984-03-09 1985-09-25 Daikin Ind Ltd Coating material

Also Published As

Publication number Publication date
JPS6363564B2 (en) 1988-12-07

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