JPS5676414A - Discharge-polymerized membrane and production thereof - Google Patents
Discharge-polymerized membrane and production thereofInfo
- Publication number
- JPS5676414A JPS5676414A JP15206979A JP15206979A JPS5676414A JP S5676414 A JPS5676414 A JP S5676414A JP 15206979 A JP15206979 A JP 15206979A JP 15206979 A JP15206979 A JP 15206979A JP S5676414 A JPS5676414 A JP S5676414A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- substrate
- polymerized membrane
- polymerized
- dry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Polymerisation Methods In General (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
PURPOSE: To produce a discharge-polymerized membrane which can be used as a thin resist film having excellent dry-etching resistance, high sensitivity and good uniformity, by discharge-polymerizing, by gas-discharge, a specified fluorine-containing compound onto a substrate under specified conditions.
CONSTITUTION: A substrate 4 is fixed on a substrate holder 5 within a reaction vessel 1; the container is then evacuated; a fluorine-containing compound of the formula, wherein R is a fluoroalkyl, is introduced from a gas inlet 2 so as to provide a pressure of 10W10-3torr; a voltage is applied between high-frequency electrodes 6 and 6' by a high-frequency source 7; the gaseous monomer is discharged and polymerized into a discharge-polymerized membrane on the substrate 4.
EFFECT: The energy ray-sensitivity of this discharge-polymerized membrane is higher several times than that of a conventional discharge-polymerized membrane of methyl methacrylate, and can be dry-developed. Accordingly, dry processing is possible in steps from development to substrate working.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15206979A JPS5676414A (en) | 1979-11-26 | 1979-11-26 | Discharge-polymerized membrane and production thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15206979A JPS5676414A (en) | 1979-11-26 | 1979-11-26 | Discharge-polymerized membrane and production thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5676414A true JPS5676414A (en) | 1981-06-24 |
JPS6363564B2 JPS6363564B2 (en) | 1988-12-07 |
Family
ID=15532367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15206979A Granted JPS5676414A (en) | 1979-11-26 | 1979-11-26 | Discharge-polymerized membrane and production thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5676414A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57119906A (en) * | 1981-01-19 | 1982-07-26 | Daikin Ind Ltd | Formation of smooth film on substrate |
JPS60188410A (en) * | 1984-03-09 | 1985-09-25 | Daikin Ind Ltd | Coating material |
-
1979
- 1979-11-26 JP JP15206979A patent/JPS5676414A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57119906A (en) * | 1981-01-19 | 1982-07-26 | Daikin Ind Ltd | Formation of smooth film on substrate |
JPH0211606B2 (en) * | 1981-01-19 | 1990-03-15 | Daikin Ind Ltd | |
JPS60188410A (en) * | 1984-03-09 | 1985-09-25 | Daikin Ind Ltd | Coating material |
Also Published As
Publication number | Publication date |
---|---|
JPS6363564B2 (en) | 1988-12-07 |
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