JPS57141954A - Manufacture of integrated circuit - Google Patents

Manufacture of integrated circuit

Info

Publication number
JPS57141954A
JPS57141954A JP56170618A JP17061881A JPS57141954A JP S57141954 A JPS57141954 A JP S57141954A JP 56170618 A JP56170618 A JP 56170618A JP 17061881 A JP17061881 A JP 17061881A JP S57141954 A JPS57141954 A JP S57141954A
Authority
JP
Japan
Prior art keywords
electrode
capacitance
layer
film
implanted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56170618A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6131637B2 (enrdf_load_stackoverflow
Inventor
Toshio Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56170618A priority Critical patent/JPS57141954A/ja
Publication of JPS57141954A publication Critical patent/JPS57141954A/ja
Publication of JPS6131637B2 publication Critical patent/JPS6131637B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP56170618A 1981-10-23 1981-10-23 Manufacture of integrated circuit Granted JPS57141954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56170618A JPS57141954A (en) 1981-10-23 1981-10-23 Manufacture of integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56170618A JPS57141954A (en) 1981-10-23 1981-10-23 Manufacture of integrated circuit

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP51024791A Division JPS604595B2 (ja) 1976-03-08 1976-03-08 集積回路

Publications (2)

Publication Number Publication Date
JPS57141954A true JPS57141954A (en) 1982-09-02
JPS6131637B2 JPS6131637B2 (enrdf_load_stackoverflow) 1986-07-21

Family

ID=15908203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56170618A Granted JPS57141954A (en) 1981-10-23 1981-10-23 Manufacture of integrated circuit

Country Status (1)

Country Link
JP (1) JPS57141954A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105465A (ja) * 1985-11-01 1987-05-15 Toshiba Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105465A (ja) * 1985-11-01 1987-05-15 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6131637B2 (enrdf_load_stackoverflow) 1986-07-21

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