JPS57134949A - Forming of ic wiring - Google Patents
Forming of ic wiringInfo
- Publication number
- JPS57134949A JPS57134949A JP1964981A JP1964981A JPS57134949A JP S57134949 A JPS57134949 A JP S57134949A JP 1964981 A JP1964981 A JP 1964981A JP 1964981 A JP1964981 A JP 1964981A JP S57134949 A JPS57134949 A JP S57134949A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- metal
- break
- deposited
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To improve reliability preventing a break of wiring metal by forming a tapered wiring pattern. CONSTITUTION:A wiring pattern 32 is formed by etching a resist coated on an SiO2 film 36 that serves as a spacer on substrate 11. Then an Al film 33 of the first metal is deposited by the electron beam evaporation method. The first layer metal wiring 33 that is obtained by removing the resist 32 is a belt shaped wiring having a tapered side. Finally an SiO2 film 34 is deposited to form over it a vertically crossed wiring 35. This method eliminates a break of vertically crossed wiring metal and making thickness of the wiring metal uniform in the direction of wiring thus improving the reliability.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1964981A JPS57134949A (en) | 1981-02-13 | 1981-02-13 | Forming of ic wiring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1964981A JPS57134949A (en) | 1981-02-13 | 1981-02-13 | Forming of ic wiring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57134949A true JPS57134949A (en) | 1982-08-20 |
Family
ID=12005082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1964981A Pending JPS57134949A (en) | 1981-02-13 | 1981-02-13 | Forming of ic wiring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57134949A (en) |
-
1981
- 1981-02-13 JP JP1964981A patent/JPS57134949A/en active Pending
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