JPS5712583A - Manufacture of semiconductor laser - Google Patents
Manufacture of semiconductor laserInfo
- Publication number
- JPS5712583A JPS5712583A JP8704280A JP8704280A JPS5712583A JP S5712583 A JPS5712583 A JP S5712583A JP 8704280 A JP8704280 A JP 8704280A JP 8704280 A JP8704280 A JP 8704280A JP S5712583 A JPS5712583 A JP S5712583A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- stripe
- oscillation
- substrate
- semiconductor laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000010355 oscillation Effects 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 238000002347 injection Methods 0.000 abstract 2
- 239000007924 injection Substances 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Weting (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8704280A JPS5712583A (en) | 1980-06-26 | 1980-06-26 | Manufacture of semiconductor laser |
US06/277,508 US4429397A (en) | 1980-06-26 | 1981-06-26 | Buried heterostructure laser diode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8704280A JPS5712583A (en) | 1980-06-26 | 1980-06-26 | Manufacture of semiconductor laser |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5712583A true JPS5712583A (en) | 1982-01-22 |
JPS6353715B2 JPS6353715B2 (enrdf_load_stackoverflow) | 1988-10-25 |
Family
ID=13903878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8704280A Granted JPS5712583A (en) | 1980-06-26 | 1980-06-26 | Manufacture of semiconductor laser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5712583A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61183987A (ja) * | 1985-02-08 | 1986-08-16 | Sony Corp | 半導体レ−ザ− |
-
1980
- 1980-06-26 JP JP8704280A patent/JPS5712583A/ja active Granted
Non-Patent Citations (1)
Title |
---|
IEEE JOURNAL OF QUANTUM ELECTRONICS=1980 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61183987A (ja) * | 1985-02-08 | 1986-08-16 | Sony Corp | 半導体レ−ザ− |
Also Published As
Publication number | Publication date |
---|---|
JPS6353715B2 (enrdf_load_stackoverflow) | 1988-10-25 |
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